IP Library Granted Patent US 9,947,687
Granted Patent B2
US 9,947,687 · App. 15/176,624 · Granted Apr 17, 2018

Memory cells comprising a programmable field effect transistor having a reversibly programmable gate insulator

Inventor: Ferdinando Bedeschi (Biassono, IT)
Assignee: Micron Technology, Inc.
H01L27/11597H01L27/1159H01L27/11587H01L29/4238H01L29/7827H01L29/78391H01L29/42392
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Quick Facts
Patent No.
US 9,947,687
App. No.
15/176,624
Granted
Apr 17, 2018
Kind
B2
Abstract

A memory cell comprises an elevationally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t 's of the programmable transistor. The programmable transistor comprises a top source/drain region and a bottom source/drain region. A bottom select device is electrically coupled in series with and elevationally inward of the bottom source/drain region of the programmable transistor. A top select device is electrically coupled in series with and is elevationally outward of the top source/drain region of the programmable transistor. A bottom select line is electrically coupled in series with and is elevationally inward of the bottom select device. A top select line is electrically coupled in series with and is elevationally outward of the top select device. Other embodiments are disclosed.

Claims (43)

1. A memory cell, comprising:

a horizontally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t 's of the programmable transistor, the programmable transistor comprising one source/drain region on one lateral side of the programmable transistor and another source/drain region on another lateral side of the programmable transistor that is opposite the one lateral side;

one select device electrically coupled in series with the one source/drain region of the programmable transistor, the one select device being on the one lateral side and elevationally outward of the programmable transistor;

another select device electrically coupled in series with the another source/drain region of the programmable transistor, the another select device being on the another lateral side and elevationally outward of the programmable transistor, the one select device and the another select device each comprising a diode;

one elevationally outer select line electrically coupled in series with and elevationally outward of the one select device; and

another elevationally outer select line electrically coupled in series with and elevationally outward of the another select device.

2. The memory cell of claim 1 wherein the one and another select devices are at the same elevation relative one another.

3. The memory cell of claim 1 wherein the one and another select lines are at the same elevation relative one another.

4. The memory cell of claim 1 wherein the gate insulator comprises programmable ferroelectric insulator material.

5. The memory cell of claim 1 wherein the gate insulator comprises programmable charge trapping insulator material.

6. The memory cell of claim 1 comprising an array of such memory cells.

7. A memory cell, comprising:

a horizontally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t 's of the programmable transistor, the programmable transistor comprising one source/drain region on one lateral side of the programmable transistor and another source/drain region on another lateral side of the programmable transistor that is opposite the one lateral side;

one select device electrically coupled in series with the one source/drain region of the programmable transistor, the one select device being on the one lateral side and elevationally outward of the programmable transistor;

another select device electrically coupled in series with the another source/drain region of the programmable transistor, the another select device being on the another lateral side and elevationally outward of the programmable transistor;

one elevationally outer select line electrically coupled in series with and elevationally outward of the one select device;

another elevationally outer select line electrically coupled in series with and elevationally outward of the another select device; and

the programmable transistor having a channel region, and further comprising a conductive electrode directly against the channel region, the electrode extending to be directly against only one of the one or another source/drain region of the programmable transistor.

8. The memory cell of claim 7 wherein the one and another select device each comprise an elevationally extending transistor.

9. The memory cell of claim 8 wherein each of the elevationally extending transistors is vertical or within 10° of vertical.

10. The memory cell of claim 8 wherein the horizontally extending programmable field effect transistor is horizontal or within 10° of horizontal.

11. The memory cell of claim 1 wherein A memory cell, comprising:

a horizontally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t 's of the programmable transistor, the programmable transistor comprising one source/drain region on one lateral side of the programmable transistor and another source/drain region on another lateral side of the programmable transistor that is opposite the one lateral side;

one select device electrically coupled in series with the one source/drain region of the programmable transistor, the one select device being on the one lateral side and elevationally outward of the programmable transistor;

another select device electrically coupled in series with the another source/drain region of the programmable transistor, the another select device being on the another lateral side and elevationally outward of the programmable transistor;

one elevationally outer select line electrically coupled in series with and elevationally outward of the one select device;

another elevationally outer select line electrically coupled in series with and elevationally outward of the another select device; and

the one select device and the another select device are two different type electrical components, one of the two different type electrical components being a field effect transistor, another of the two different type electrical components not being a field effect transistor.

12. A memory cell, comprising:

a horizontally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t 's of the programmable transistor, the programmable transistor comprising one source/drain region on one lateral side of the programmable transistor and another source/drain region on another lateral side of the programmable transistor that is opposite the one lateral side;

one select device electrically coupled in series with the one source/drain region of the programmable transistor, the one select device being on the one lateral side and elevationally outward of the programmable transistor;

another select device electrically coupled in series with the another source/drain region of the programmable transistor, the another select device being on the another lateral side and elevationally outward of the programmable transistor;

one elevationally outer select line electrically coupled in series with and elevationally outward of the one select device;

another elevationally outer select line electrically coupled in series with and elevationally outward of the another select device; and

the one and another select device are each non-programmable field effect transistors having a respective conductive gate, a respective channel region, and a respective gate insulator there-between; the respective conductive gates and respective gate insulator completely encircling their respective channel regions.

13. A memory cell, comprising:

a horizontally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t 's of the horizontally extending programmable transistor, the horizontally extending programmable transistor comprising one source/drain region on one lateral side of the horizontally extending programmable transistor and another source/drain region on another lateral side of the horizontally extending programmable transistor that is opposite the one lateral side;

one elevationally extending field effect transistor comprising and sharing the one source source/drain region of the horizontally extending programmable transistor thereby directly electrically coupling the one elevationally extending field effect transistor and the horizontally extending programmable transistor in series with one another, the one elevationally extending field effect transistor being on the one lateral side and elevationally outward of the horizontally extending programmable transistor;

another elevationally extending field effect transistor comprising and sharing the another source/drain region of the horizontally extending programmable transistor thereby directly electrically coupling the another elevationally extending field effect another transistor and the horizontally extending programmable transistor in series with one another, the another elevationally extending field effect transistor being on the another lateral side and elevationally outward of the horizontally extending programmable transistor;

one elevationally outer select line electrically coupled in series with and elevationally outward of the one elevationally extending field effect transistor; and

another elevationally outer select line electrically coupled in series with and elevationally outward of the another elevationally extending field effect transistor.

14. The memory cell of claim 13 wherein the one and another elevationally extending field effect transistor are non-programmable.

15. The memory cell of claim 13 wherein the one and another elevationally extending field effect transistor are vertical or with 10° of vertical.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050676/0782 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046635/0634 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 1 TO PATENT SECURITY AGREEMENT Recorded Aug 26, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 039841/0207 →
SUPPLEMENT NO. 1 TO PATENT SECURITY AGREEMENT Recorded Aug 25, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 039824/0681 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 8, 2016
From: BEDESCHI, FERDINANDO
To: MICRON TECHNOLOGY, INC.
Reel/Frame 038843/0958 →
Continuity (1)
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