IP Library › Granted Patent US 10,008,585
Granted Patent B2
US 10,008,585 · App. 15/190,543 · Granted Jun 26, 2018

Semiconductor structure with an L-shaped bottom plate

Inventors: Kangguo Cheng (Schenectady, NY); Wilfried E. Haensch (Somers, NY); Ali Khakifirooz (Los Altos, CA); Davood Shahrjerdi (Brooklyn, NY)
Assignee: International Business Machines Corporation
H01L29/66666H01L21/823412H01L21/823418H01L21/823475H01L21/823487H01L21/84H01L27/088H01L29/0649H01L29/0847H01L29/1037H01L29/41741H01L29/42392H01L29/66484H01L29/66545H01L29/7827H01L29/78618H01L29/78642H01L29/78696
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Quick Facts
Patent No.
US 10,008,585
App. No.
15/190,543
Granted
Jun 26, 2018
Kind
B2
Abstract

A semiconductor structure that has adjacent transistors that share a common source/drain semiconductor structure. At least one of the adjacent transistors comprising: a vertical channel and a source/drain semiconductor structure connected to the vertical channel such that the source/drain semiconductor structure has a vertical side that is substantially planar with a vertical side of the first vertical channel. The source/drain semiconductor structure extends horizontally from its vertical side farther than the first vertical channel extends from its vertical side such that a width of the source/drain is greater than a width of the first vertical channel. The first source/drain semiconductor structure is located on a layer of substrate and the vertical channel is perpendicular relative to the layer of substrate.

Claims (21)

1. A semiconductor structure, the semiconductor structure comprising:

adjacent transistor structures that share a first source/drain semiconductor structure that is composed of a doped semiconductor material;

at least one of the adjacent transistor structures comprising:

a first vertical channel;

a gate encompassing at least a vertical length of the first vertical channel; and

the first source/drain semiconductor structure being connected to the first vertical channel, wherein an end of the first vertical channel abuts a horizontal surface of the first source/drain semiconductor structure such that the first source/drain semiconductor structure has a vertical side that is substantially planar with a vertical side of the first vertical channel, the first source/drain semiconductor structure extending horizontally from its vertical side farther than the first vertical channel extends from its vertical side such that a length of the horizontal surface equals a width of the source/drain semiconductor structure as measured from the vertical side to an opposite side of the first source/drain semiconductor structure, wherein the width of the source/drain semiconductor structure is greater than a width of the first vertical channel, the first source/drain semiconductor structure being located on a layer of substrate, wherein the horizontal surface is parallel to the layer of substrate at a distance, the vertical channel being perpendicular relative to the layer of substrate.

2. The semiconductor structure of claim 1 , the semiconductor structure further comprising:

a first gate structure that is in contact with at least a portion of the first vertical channel; and

a first layer of dielectric material that covers the gate, the first source/drain semiconductor structure and at least a portion of the first vertical channel.

3. The semiconductor structure of claim 1 , the semiconductor structure further comprising:

a second source/drain semiconductor structure that is in contact with the first vertical channel wherein the first gate structure is interposed between the first source/drain semiconductor structure and the second source/drain semiconductor structure.

4. The semiconductor structure of claim 1 , the semiconductor structure further comprising:

a first electrical contact that is connected to the first source/drain semiconductor structure.

5. The semiconductor structure of claim 4 , the semiconductor structure further comprising:

a second layer of dielectric material that covers at least the first source/drain semiconductor structure, wherein the first electrical contact passes through at least a portion of the second layer of dielectric material.

6. The semiconductor structure of claim 1 , wherein the first source/drain semiconductor structure comprises:

a third source/drain semiconductor structure located on the layer of substrate;

a second vertical channel connected to third source/drain semiconductor structure, the third source/drain semiconductor structure having a vertical side that is substantially planar with a vertical side of the second vertical channel, the vertical side of the first vertical channel faces vertical side of the second vertical channel;

a third vertical channel connected to the third source/drain semiconductor structure, the third source/drain semiconductor structure having a vertical side that is substantially planar with a vertical side of the third vertical channel.

7. The semiconductor structure of claim 6 , the semiconductor structure further comprising:

the second vertical channel being interposed between the first vertical channel and the third vertical channel, a distance between the first vertical channel and the second vertical channel being substantially less than and a distance between the second vertical channel and the third vertical channel.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 23, 2016
From: CHENG, KANGGUO; HAENSCH, WILFRIED E.; KHAKIFIROOZ, ALI; SHAHRJERDI, DAVOOD
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 038995/0311 →
Continuity (3)
Division 15181447 · Jun 14, 2016
Division 14496442 · Sep 25, 2014
Related Publication 20160307892A1 · Oct 20, 2016