Methods of forming structures
View Patent ↗Some embodiments include methods of forming structures. Spaced-apart features are formed which contain temperature-sensitive material. Liners are formed along sidewalls of the features under conditions which do not expose the temperature-sensitive material to a temperature exceeding 300° C. The liners extend along the temperature-sensitive material and narrow gaps between the spaced-apart features. The narrowed gaps are filled with flowable material which is cured under conditions that do not expose the temperature-sensitive material to a temperature exceeding 300° C. In some embodiments, the features contain memory cell regions over select device regions. The memory cell regions include first chalcogenide and the select device regions include second chalcogenide. The liners extend along and directly against the first and second chalcogenides.
1. An integrated structure, comprising:
spaced-apart features containing memory cell regions; the memory cell regions comprising phase change material;
liners along sidewalls of the features; the liners extending along and directly against the phase change material; the liners narrowing gaps between the spaced-apart features;
oxygen-containing material filling the narrowed gaps; and
wherein the liners comprise a laminate of an aluminum-containing material and silicon nitride, with the silicon nitride being directly against the sidewalls of the features and the aluminum-containing material being directly against the oxygen-containing material.
2. The integrated structure of claim 1 wherein the aluminum-containing material is aluminum oxide.
3. The integrated structure of claim 1 wherein the liners have substantially uniform thickness along entire heights of individual sidewalls.
4. The integrated structure of claim 1 wherein the liners do not have substantially uniform thickness along entire heights of individual sidewalls.
5. The integrated structure of claim 1 wherein the liners extend across bottoms of gaps between spaced-apart features.
6. The integrated structure of claim 1 wherein the liners do not extend across bottoms of gaps between spaced-apart features.
7. The integrated structure of claim 1 wherein the phase change material is chalcogenide.
8. An integrated structure, comprising:
spaced-apart features containing memory cell regions over select device regions; the memory cell regions comprising phase change material;
liners along sidewalls of the features; the liners extending along and directly against the phase change material; the liners narrowing gaps between the spaced-apart features;
oxygen-containing material filling the narrowed gaps; and
wherein the liners comprise a laminate of an aluminum-containing material and nitrogen-containing material, with the nitrogen-containing material being directly against the sidewalls of the features and the aluminum-containing material being directly against the oxygen-containing material.
9. The integrated structure of claim 8 wherein the phase change material comprises first chalcogenide and the select device regions comprise second chalcogenide.
10. The integrated structure of claim 8 wherein the nitrogen-containing material is silicon nitride.
11. The integrated structure of claim 10 wherein the aluminum-containing material is aluminum oxide.
12. The integrated structure of claim 8 wherein the liners have substantially uniform thickness along entire heights of individual sidewalls.
13. The integrated structure of claim 8 wherein the liners do not have substantially uniform thickness along entire heights of individual sidewalls.
14. The integrated structure of claim 8 wherein the liners extend across tops of the features.
15. The integrated structure of claim 8 wherein the liners do not extend across tops of the features.
16. An integrated structure, comprising:
spaced-apart features containing memory cell regions over select device regions; the memory cell regions comprising first chalcogenide and the select device regions comprising second chalcogenide;
liners along sidewalls of the features; the sidewalls including surfaces of the first and second chalcogenides; the liners extending along and directly against the surfaces of the first and second chalcogenides; the liners narrowing gaps between the spaced-apart features;
oxygen-containing material within the narrowed gaps and along the liners; and
wherein the liners comprise a laminate of an aluminum-containing material and nitrogen-containing material, with the nitrogen-containing material being directly against the sidewalls of the features and the aluminum-containing material being directly against the oxygen-containing material.
17. The integrated structure of claim 16 wherein the liners are a same thickness along the first chalcogenide as along the second chalcogenide.
18. The integrated structure of claim 16 wherein the liners are not a same thickness along the first chalcogenide as along the second chalcogenide.
19. The integrated structure of claim 16 wherein the first and second chalcogenides are a same composition as one another.
20. The integrated structure of claim 16 wherein the first and second chalcogenides are different compositions relative to one another.
21. The integrated structure of claim 16 wherein the nitrogen-containing material is silicon nitride, and wherein the aluminum-containing material is aluminum oxide.