SCANNING ELECTRON MICROSCOPE

1 . A scanning electron microscope comprising:

an electron beam source for generating a primary electron beam;

an electron optical system configured to direct the primary electron beam to a specimen while focusing and deflecting the primary electron beam; and

an energy analyzing system capable of performing parallel detection of an energy spectrum of back-scattered electrons emitted from the specimen, the energy analyzing system including:

a Wien filter configured to separate the back-scattered electrons from a beam axis and analyze energies of the back-scattered electrons; and

an array detector configured to detect the back-scattered electrons that have passed through the Wien filter,

wherein the Wien filter includes a plurality of electromagnetic poles, center-side ends of the plurality of electromagnetic poles have tapered surfaces, respectively, and the tapered surfaces form an exit of the Wien filter through which the back-scattered electrons pass out.

2 . The scanning electron microscope according to claim 1 , wherein the Wien filter is configured to be able to change strengths of quadrupole fields comprising an electric field or a magnetic field, in order to optimize energy resolution in an energy range in which an image of the back-scattered electrons is formed.

3 . The scanning electron microscope according to claim 1 , further comprising:

an imaging device configured to create an image using only output signals of the array detector within a preselected energy range.