Electrostatic discharge devices and methods of manufacture
Electrostatic discharge (ESD) devices and methods of manufacture are provided. The method includes forming a plurality of fin structures and a mesa structure from semiconductor material. The method further includes forming an epitaxial material with doped regions on the mesa structure and forming gate material over at least the plurality of fin structures. The method further includes planarizing at least the gate material such that the gate material and the epitaxial material are of a same height. The method further includes forming contacts in electrical connection with respective ones of the doped regions of the epitaxial material.
1. A method of manufacturing a semiconductor structure, comprising:
forming a mesa structure composed of silicon on insulator material;
forming a fin region separate from the mesa structure with a plurality of fin structures composed of the silicon on insulator material;
forming epitaxial material on the mesa structure; and
forming a gate material over the plurality of fin structures, wherein the gate material and the epitaxial material on the mesa structure are of a same height.
2. The method of claim 1 , wherein:
the mesa structure and the plurality of fin structures have substantially the same height;
the epitaxial material is grown crystalline material; and
the epitaxial material has a greater height than the plurality of fin structures.
3. The method of claim 1 , wherein:
the plurality of fin structures are the silicon on insulator material;
the mesa structure includes doped regions of the epitaxial material; and
the gate material is planarized such that the gate material and the epitaxial material are of the same height.
4. The method of claim 3 , further comprising forming contacts in electrical connection with respective ones of the doped regions of the epitaxial material.
5. The method of claim 4 , wherein the epitaxial material is a crystalline material grown on an exposed surface of the mesa structure.
6. The method of claim 1 , wherein the epitaxial material and the mesa structure form an electrostatic discharge device of a same height as a gate structure.
7. The method of claim 1 , wherein the plurality of fin structures and the mesa structure are formed from the silicon on insulator (SOI) material.
8. The method of claim 7 , wherein the fin structures and mesa structure are separated by an insulating material.
9. The method of claim 7 , further comprising forming nitride sidewalls on sidewalls of the epitaxial material.
10. The method of claim 1 , further comprising forming contacts in electrical connection with regions of the epitaxial material.
11. The method of claim 1 , wherein the fin structures and mesa structure are separated by an insulating material.
12. The method of claim 11 , wherein a top surface of the insulating material is at a same height as a top surface of the epitaxial material.
13. The method of claim 11 , wherein a top surface of the insulating material is at a same height as a top surface of the gate material.
14. The method of claim 11 , wherein a top surface of the insulating material is at a greater height than the plurality of fin structures.
15. The method of claim 11 , further comprising forming an insulator layer on the insulating material, the epitaxial material, and the gate material.
16. The method of claim 15 , further comprising forming contacts in the insulator layer and in electrical contact with doped regions of the epitaxial material.