IP Library Granted Patent US 9,679,769
Granted Patent B1
US 9,679,769 · App. 15/199,751 · Granted Jun 13, 2017

Integrated circuit packaging system with photoimagable dielectric-defined trace and method of manufacture thereof

Inventors: Zigmund Ramirez Camacho (Singapore, SG); Bartholomew Liao Chung Foh (Singapore, SG); Sheila Marie L. Alvarez (Singapore, SG); Dao Nguyen Phu Cuong (Singapore, SG); HeeJo Chi (Yeoju-gun, KR)
Assignee: STATS ChipPAC Pte. Ltd.
H01L21/0335H01L21/56H01L21/76879H01L23/528H01L23/5226H01L23/53233H01L23/53242H01L24/03H01L24/08H01L24/11H01L24/13H01L24/43H01L24/45H01L2224/0401H01L2224/04042H01L2224/05026
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Quick Facts
Patent No.
US 9,679,769
App. No.
15/199,751
Granted
Jun 13, 2017
Kind
B1
Abstract

A system and method of manufacture of an integrated circuit packaging system includes: a photoimagable dielectric layer having a trace opening for exposing the carrier; a trace within the trace opening; an inner solder resist layer directly on the photoimagable dielectric layer and the trace, the inner solder resist layer having a bond pad opening for exposing the trace; an integrated circuit over the inner solder resist layer, the integrated circuit electrically connected to the trace through the bond pad opening; an encapsulation directly on the integrated circuit and the inner solder resist layer; and an external interconnect electrically coupled to the trace and the integrated circuit.

Claims (43)

1. A method of manufacture of an integrated circuit packaging system comprising:

forming a photoimagable dielectric layer on a carrier, the photoimagable dielectric layer having a trace opening for exposing the carrier;

forming a trace within the trace opening;

forming an inner solder resist layer directly on the photoimagable dielectric layer and the trace, the inner solder resist layer having a bond pad opening for exposing the trace, and the trace having a trace recess partially filling the trace opening for mold locking with the inner solder resist layer;

removing the carrier for exposing the photoimagable dielectric layer and the trace;

mounting an integrated circuit over the inner solder resist layer, the integrated circuit electrically connected to the trace through the bond pad opening;

forming an encapsulation directly on the integrated circuit and the inner solder resist layer; and

forming an external interconnect electrically coupled to the trace and the integrated circuit.

2. The method as claimed in claim 1 wherein forming the trace includes forming a trace recess by partially filling the trace opening for mold locking with the inner solder resist layer.

3. The method as claimed in claim 1 further comprising:

forming a bond pad directly on the trace and within the bond pad opening; and

connecting a die interconnect from the integrated circuit to the bond pad.

4. The method as claimed in claim 1 further comprising forming a bond pad and a bond pad recess in the bond pad opening, the bond pad recess for mold locking with the encapsulation.

5. The method as claimed in claim 1 wherein forming the trace includes forming the trace within the photoimagable dielectric layer and on the inner solder resist layer.

6. The method as claimed in claim 1 further comprising forming a vertical interconnect electrically coupled between the trace and the external interconnect.

7. The method as claimed in claim 1 wherein forming the trace includes forming the trace electrically coupled between the bond pad and the external interconnect.

8. The method as claimed in claim 1 wherein mounting the integrated circuit includes mounting a flip chip package having a die interconnect between the flip chip package and the bond pad.

9. The method as claimed in claim 1 further comprising connecting a bond wire electrically coupled between the integrated circuit and the bond pad.

10. The method as claimed in claim 1 wherein forming the encapsulation includes forming the encapsulation directly on the trace.

11. A method of manufacture of an integrated circuit packaging system comprising:

forming a photoimagable dielectric layer directly on a metal layer of a carrier, the photoimagable dielectric layer having a trace opening exposing the carrier;

forming a trace within the trace opening;

forming an inner solder resist layer directly on the photoimagable dielectric layer and the trace, the inner solder resist layer having a bond pad opening for exposing the trace, and the trace having a trace recess partially filling the trace opening for mold locking with the inner solder resist layer;

removing the carrier for exposing the photoimagable dielectric layer and the trace;

forming an outer solder resist layer directly on the photoimagable dielectric layer and the trace, the outer solder resist layer having a ball pad opening for exposing the trace;

mounting an integrated circuit over the inner solder resist layer;

forming an encapsulation directly on the integrated circuit and the inner solder resist layer; and

forming an external interconnect electrically coupled to the trace and the integrated circuit.

12. The method as claimed in claim 11 wherein forming the trace includes forming the trace recess by partially filling the trace opening for mold locking with the inner solder resist layer, the trace directly on the photoimagable dielectric layer.

13. The method as claimed in claim 11 further comprising:

forming a bond pad directly on the trace and within the bond pad opening;

forming a ball pad directly on the trace and within the ball pad opening;

forming the external interconnect directly on the ball pad; and

connecting a die interconnect from the integrated circuit to the bond pad for electrically connecting the integrated circuit and the ball pad.

14. The method as claimed in claim 11 further comprising:

forming a bond pad and a bond pad recess in the bond pad opening, the bond pad recess for mold locking with the encapsulation; and

forming a ball pad and a ball pad recess in the ball pad opening, the ball pad recess for mold locking with the external interconnect.

15. The method as claimed in claim 11 wherein forming the trace includes forming the trace within the photoimagable dielectric layer, the trace on the inner solder resist layer and the outer solder resist layer.

16. The method as claimed in claim 11 further comprising forming a vertical interconnect electrically coupled between the trace and the external interconnect.

17. The method as claimed in claim 11 wherein forming the trace includes forming the trace electrically coupled between the bond pad and the external interconnect.

18. The method as claimed in claim 11 wherein mounting the integrated circuit includes mounting a flip chip package having a die interconnect between the flip chip package and the bond pad.

19. The method as claimed in claim 11 further comprising connecting a bond wire electrically coupled between the integrated circuit and the bond pad.

20. The method as claimed in claim 11 wherein forming the encapsulation includes forming the encapsulation directly on the trace.

Assignments (2)
CHANGE OF NAME Recorded Nov 9, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 040581/0250 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 8, 2016
From: CAMACHO, ZIGMUND RAMIREZ; CHUNG FOH, BARTHOLOMEW LIAO; ALVAREZ, SHEILA MARIE L.; PHU CUONG, DAO NGUYEN; CHI, HEEJO
To: STATS CHIPPAC LTD.
Reel/Frame 040254/0840 →
Continuity (1)
Division 14229280 · Mar 28, 2014