One time programmable non-volatile memory device
A one-time programmable non-volatile memory device includes a first conductivity type well region located in a semiconductor substrate, a selection gate electrode and a floating gate electrode located on the substrate, a first doped region located between the selection gate electrode and the floating gate electrode, a second conductivity type source region located on one side of the selection gate electrode, and a second conductivity type drain region located on one side of the floating gate electrode, wherein a depth of the drain region has a depth shallower than that of the first doped region with respect to a top surface of the substrate.
1. A one-time programmable non-volatile memory device, comprising:
a first conductivity type well region located in a semiconductor substrate;
a selection gate electrode and a floating gate electrode located on the substrate;
a first doped region located between the selection gate electrode and the floating gate electrode, the first doped region overlapping with the floating gate electrode and the selection gate electrode;
a second conductivity type source region located on one side of the selection gate electrode; and
a second conductivity type drain region located on one side of the floating gate electrode, wherein
a depth of the drain region has a shallower depth than that of the first doped region with respect to a top surface of the substrate.
2. The one-time programmable non-volatile memory device of claim 1 , further comprising a contact plug located on the source and drain regions, and wherein the contact plug is not located on the first doped region.
3. The one-time programmable non-volatile memory device of claim 1 , wherein the first doped region comprises a heavily doped region and a lightly doped region, and the drain region comprises a lightly doped region that is blocked.
4. The one-time programmable non-volatile memory device of claim 1 , further comprising a third doped region located between the drain region and the well region, wherein the third doped region completely surrounds the drain region, and has an opposite conductivity type from the drain region.
5. The one-time programmable non-volatile memory device of claim 1 , further comprising a third doped region located between the drain region and the well region, wherein the third doped region has a shallower depth than that of the first doped region, and has a same conductivity type as the drain region.
6. The one-time programmable non-volatile memory device of claim 1 , further comprising a third doped region formed between the drain region and the well region, wherein the third doped region completely surrounds the drain region, and has a lower dopant concentration than the drain region.
7. The one-time programmable non-volatile memory device of claim 1 , further comprising a contact plug located on the selection gate electrode, wherein the contact plug is not located on the floating gate electrode, and the selection gate electrode and the floating gate electrode are doped with a dopant of the second conductivity type.
8. The one-time programmable non-volatile memory device of claim 7 , wherein the contact plug is a word line contact plug, a bit line contact plug, or a source line contact plug.
9. The one-time programmable non-volatile memory device of claim 1 , wherein the source region comprises a heavily doped region and a lightly doped region, and a depth of the source region is deeper than a depth of the drain region.
10. The one-time programmable non-volatile memory device of claim 1 , further comprising a silicide layer located on the selection gate electrode, wherein a silicide blocking layer is located on the floating gate electrode.
11. The one-time programmable non-volatile memory device of claim 10 , wherein the silicide blocking layer is a silicon oxide layer or a silicon nitride layer.
12. A one-time programmable non-volatile memory device comprising:
a semiconductor substrate comprising an active region and an isolation region;
at least one pair of floating gate regions located on the substrate;
at least one pair of selection gate electrodes located on the external side of the at least one pair of floating gate electrodes;
a drain region located between the floating gate electrodes;
a first doped region located between the selection gate electrode and the floating gate electrode;
a source region located on one side of the selection gate electrode; and
a well region located to surround the source region and the drain region, wherein
the drain region has a shallower depth than that of the first doped region with respect to a top surface of the substrate.
13. The one-time programmable non-volatile memory device of claim 12 , wherein the first doped region comprises a heavily doped region and a lightly doped region and the lightly doped region is blocked in the drain region.
14. The one-time programmable non-volatile memory device of claim 12 , wherein a length of the floating gate electrode is shorter than a length of the selection gate electrode.
15. The one-time programmable non-volatile memory device of claim 12 , further comprising a contact plug located on the source region and the drain region and wherein the contact plug is not located on the first doped region.
16. The one-time programmable non-volatile memory device of claim 12 , further comprising a contact plug located on the selection gate electrode, wherein the contact plug is not located on the floating gate electrode, and the selection gate electrode and the floating gate electrode are doped with a dopant of a second conductivity type.
17. The one-time programmable non-volatile memory device of claim 12 , wherein the source region comprises a heavily doped source region and a lightly doped source region and a depth of the source region is deeper than a depth of the drain region.
18. The one-time programmable non-volatile memory device of claim 12 , further comprising a silicide layer located on the selection gate electrode, wherein the silicide layer is not located on the floating gate electrode.