Semiconductor device and manufacturing method thereof
A semiconductor device including a relatively thin interposer excluding a through silicon hole and a manufacturing method thereof are provided. The method includes forming an interposer on a dummy substrate. The forming of the interposer includes, forming a dielectric layer on the dummy substrate, forming a pattern and a via on the dielectric layer, and forming a seed layer at the pattern and the via of the dielectric layer and forming a redistribution layer and a conductive via on the seed layer. A semiconductor die is connected with the conductive via facing an upper portion of the interposer, and the semiconductor die is encapsulated with an encapsulant. The dummy substrate is removed from the interposer. A bump is connected with the conductive via facing a lower portion of the interposer.
1. A method of manufacturing a semiconductor device, the method comprising:
coupling a semiconductor die to an upper side of an inorganic portion of an interposer, wherein the inorganic portion of the interposer comprises:
an inorganic dielectric layer on a temporary substrate; and
a first conductive layer along a portion of the inorganic dielectric layer;
after said coupling the semiconductor die, removing the temporary substrate from a lower side of the inorganic portion of the interposer;
after said removing the temporary substrate, forming an organic portion of the interposer on the lower side of the inorganic portion of the interposer, the organic portion of the interposer comprising:
an organic dielectric layer; and
a second conductive layer along a portion of the organic dielectric layer.
2. The method of claim 1 , wherein the temporary substrate comprises a silicon wafer.
3. The method of claim 2 , wherein said removing the temporary substrate comprises grinding the silicon wafer.
4. The method of claim 1 , comprising:
forming an aperture in the organic dielectric layer to expose the second conductive layer; and
forming an under bump metallization (UBM) layer on a portion of the second conductive layer exposed by the aperture.
5. The method of claim 4 , comprising forming the UBM layer on a lower surface of the organic dielectric layer around the aperture.
6. The method of claim 5 , wherein said attaching the semiconductor die to an inorganic portion of the interposer comprises attaching the semiconductor die to an upper UBM layer on the first conductive layer.
7. The method of claim 1 , wherein:
the inorganic portion of the interposer is formed in a wafer fab process; and
the organic portion of the interposer is formed in a die packaging process.
8. The method of claim 1 , wherein the inorganic dielectric layer comprises at least one of: silicon nitride and/or silicon oxide.
9. A method of manufacturing a semiconductor device, the method comprising:
receiving an assembly comprising:
a semiconductor die; and
an interposer below the semiconductor die and comprising:
an inorganic dielectric layer;
a first conductive layer along a portion of the inorganic dielectric layer and coupled to the semiconductor die;
an organic dielectric layer below the inorganic dielectric layer;
a second conductive layer along a portion of the organic dielectric layer; and
a conductive post connected to the second conductive layer and protruding downward from the interposer; and
coupling the conductive post of the received assembly to a substrate.
10. The method of claim 9 , wherein the substrate comprises a package substrate for the semiconductor device.
11. The method of claim 9 , wherein the conductive post comprises plated metal.
12. The method of claim 11 , wherein prior to said coupling, the conductive post comprises solder covering at least a lower end surface of the plated metal.
13. The method of claim 9 , comprising:
forming an aperture in the organic dielectric layer to expose the second conductive layer; and
forming an under bump metallization (UBM) layer on a portion of the second conductive layer exposed by the aperture.
14. The method of claim 13 , comprising forming the UBM layer on a lower surface of the organic dielectric layer around the aperture.
15. A method of manufacturing a semiconductor device, the method comprising:
receiving an assembly comprising:
a semiconductor die; and
an interposer below the semiconductor die and comprising:
an inorganic dielectric layer;
a first conductive layer along a portion of the inorganic dielectric layer and connected to the semiconductor die;
an organic dielectric layer below the inorganic dielectric layer; and
a second conductive layer along a portion of the organic dielectric layer;
forming an under bump metallization (UBM) layer on the second conductive layer; and
forming a conductive interconnection structure on the UBM layer.
16. The method of claim 15 , comprising:
forming an aperture in the organic dielectric layer to expose the second conductive layer; and
forming the UBM layer on a portion of the second conductive layer exposed by the aperture.
17. The method of claim 16 , wherein the conductive interconnection structure comprises a conductive ball.
18. The method of claim 16 , comprising forming the UBM on a lower surface the organic dielectric layer around the aperture.
19. The method of claim 15 , wherein the entire UBM is below the interposer.
20. The method of claim 19 , wherein the UBM is coupled to a metal post protruding below the interposer.