Semiconductor constructions and NAND unit cells
Some embodiments include methods of forming semiconductor constructions. Alternating layers of n-type doped material and p-type doped material may be formed. The alternating layers may be patterned into a plurality of vertical columns that are spaced from one another by openings. The openings may be lined with tunnel dielectric, charge-storage material and blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed within the lined openings. Some embodiments include methods of forming NAND unit cells. Columns of alternating n-type material and p-type material may be formed. The columns may be lined with a layer of tunnel dielectric, a layer of charge-storage material, and a layer of blocking dielectric. Alternating layers of insulative material and conductive control gate material may be formed between the lined columns. Some embodiments include semiconductor constructions, and some embodiments include NAND unit cells.
1. A NAND unit cell comprising:
a pair of selecting devices comprising transistors extending vertically relative a substrate;
at least two string devices connected serially, each string device comprising a transistor extending vertically relative the substrate and between the pair of selecting devices; and
a charge-storage layer incorporated into each transistor of each string device and into each transistor of each selecting device, the charge-storage layer comprising more than one charge-trapping composition.
2. The NAND unit cell of claim 1 wherein at least one of the more than one charge-trapping compositions comprises one of the following: metallic nanodots and semiconductive nanodots.
3. The NAND unit cell of claim 2 wherein another one of the more than one charge-trapping compositions comprises charge-trapping insulative material.
4. The NAND unit cell of claim 3 wherein the nanodots are embedded in the charge-trapping insulative material.
5. The NAND unit cell of claim 1 wherein at least one of the more than one charge-trapping compositions comprises a charge-trapping insulative material.
6. The NAND unit cell of claim 1 wherein at least one of the more than one charge-trapping compositions comprises silicon nitride.
7. A NAND unit cell comprising:
a pair of selecting devices comprising transistors extending vertically relative a substrate;
at least two string devices connected serially, each string device comprising a transistor extending vertically relative the substrate and between the pair of selecting devices;
a charge-storage layer incorporated into each transistor of each string device and into each transistor of each selecting device; and
a tunnel dielectric adjacent the charge-storage layer, the tunnel dielectric comprising one of the following:
a single composition of SiON;
a multi-composition stack; or
at least two of the following: silicon dioxide, high-k dielectric material, and low-k dielectric material.
8. The NAND unit cell of claim 7 wherein the multi-composition stack comprises a multi-layer stack of low-k materials.
9. The NAND unit cell of claim 7 wherein the multi-composition stack comprises an ONO stack.
10. The NAND unit cell of claim 7 wherein the multi-composition stack comprises a multi-layer stack of high-k materials.
11. The NAND unit cell of claim 1 wherein at least a portion of the charge-storage layer comprises nanodots.
12. The NAND unit cell of claim 11 wherein the nanodots comprise semiconductive nanodots.
13. The NAND unit cell of claim 11 wherein the nanodots are embedded in insulative material.
14. The NAND unit cell of claim 1 further comprising one or more of the following: silicon dioxide; high-k dielectric material; and low-k dielectric material.
15. The NAND unit cell of claim 1 further comprising at least two of the following: silicon dioxide; high-k dielectric material; and low-k dielectric material.
16. The NAND unit cell of claim 15 wherein the high-k dielectric material comprises aluminum oxide.
17. The NAND unit cell of claim 7 wherein at least a portion of the charge-storage layer comprises nanodots.
18. The NAND unit cell of claim 17 wherein the nanodots comprise semiconductive nanodots.
19. The NAND unit cell of claim 17 wherein the nanodots are embedded in insulative material.