Semiconductor device and manufacturing method thereof
View Patent ↗Provided are a semiconductor device and a method of manufacturing the same. A carrier is removed after a first semiconductor die and a second semiconductor die are stacked on each other, and then a first encapsulant is formed, so that the carrier may be easily removed when compared to approaches in which a carrier is removed from a wafer having a thin thickness.
1. A semiconductor device comprising:
a first die comprising a conductive path electrically connecting a conductive member disposed on a first surface of the first die to a corresponding conductive pad disposed on a second surface of the first die opposite the first surface;
a first chip comprising:
a first surface on which is disposed an interconnection structure connected to the conductive member on the first surface of the first die via the conductive pad and the conductive path,
a second surface opposite the first surface of the first chip, and
a plurality of side surfaces connecting the first and second surfaces of the first chip;
a first encapsulant directly contacting at least a portion of the second surface of the first die and at least one of the plurality of side surfaces of the first chip; and
a second encapsulant surrounding:
the first die,
the first chip, and
the first encapsulant.
2. The semiconductor device of claim 1 , wherein:
the first encapsulant directly contacts the second surface of the first chip.
3. The semiconductor device of claim 1 , wherein:
the first die comprises a semiconductor material.
4. The semiconductor device of claim 1 , wherein:
the conductive path and the conductive pad of the first die comprise circuitry remaining from a grinded-off semiconductor body.
5. The semiconductor device of claim 1 , wherein:
the second surface of the first chip is exposed to the outside of the semiconductor device.
6. The semiconductor device of claim 1 , wherein:
the second surface of the first chip is exposed to the outside of the second encapsulant.
7. The semiconductor device of claim 1 , further comprising:
a cover over a surface of the second encapsulant and attached to the second surface of the first chip.
8. The semiconductor device of claim 1 , wherein:
a surface of the first encapsulant is exposed to the outside of the second encapsulant.
9. The semiconductor device of claim 1 , wherein:
the first encapsulant covers the second surface of the first chip.
10. The semiconductor device of claim 1 , wherein:
the conductive member comprises a pillar.
11. The semiconductor device of claim 1 , wherein:
the entire second surface of the first chip is contacted by the first encapsulant.
12. The semiconductor device of claim 1 , wherein:
the second surface of the first chip is directly contacted by the second encapsulant.
13. The semiconductor device of claim 1 , wherein the semiconductor device further comprises an under fill contacting the first surface of the first die, and wherein the second encapsulant surrounds the under fill.
14. The semiconductor device of claim 1 , wherein the first encapsulant comprises a first mold compound and the second encapsulant comprises a second mold compound, and wherein a side surface of the first encapsulant and a side surface of the second encapsulant are vertical.
15. A semiconductor device comprising:
a first die comprising a conductive path electrically connecting a conductive member disposed on a first surface of the first die to a corresponding conductive pad disposed on a second surface of the first die opposite the first surface;
a first chip comprising a first surface on which is disposed an interconnection structure connected to the conductive member on the first surface of the first die via the conductive pad and the conductive path;
a first encapsulant directly contacting at least a portion of the second surface of the first die and at least a side surface of the first chip;
a circuit board comprising a conductive layer on a first surface connected to the first chip via the conductive member, the conductive path, the conductive pad, and the interconnection structure; and
a second encapsulant that surrounds a side surface of the first die, the first encapsulant, and the first chip.
16. The semiconductor device of claim 15 , wherein:
the first encapsulant directly contacts a second surface of the first chip opposite the first surface of the first chip.
17. The semiconductor device of claim 15 , wherein:
the conductive member comprises a conductive pillar.
18. The semiconductor device of claim 15 , wherein the semiconductor device further comprises an under fill contacting the first surface of the first die, and wherein the second encapsulant surrounds the under fill.
19. The semiconductor device of claim 15 , wherein the first encapsulant comprises a first mold compound and the second encapsulant comprises a second mold compound, and wherein a side surface of the first encapsulant and a side surface of the second encapsulant are vertical.
20. A semiconductor device comprising:
a first die comprising a conductive path electrically connecting a conductive member disposed on a first surface of the first die to a corresponding conductive pad disposed on a second surface of the first die opposite the first surface;
a first chip comprising a first surface on which is disposed an interconnection structure connected to the conductive member on the first surface of the first die via the conductive pad and the conductive path;
a first encapsulant that fills a space between the second surface of the first die and the first surface of the first chip, and that directly contacts at least a side surface of the first chip;
a circuit board comprising a first surface and a second surface opposite the first surface of the circuit board, the second surface of the circuit board comprising a conductive layer facing the first surface of the first die and connected to the first chip via the conductive member, the conductive path, the conductive pad, and the interconnection structure; and
a second encapsulant that surrounds at least a side surface of the first die, that covers at least a side surface of the first encapsulant, and that directly contacts at least a portion of the second surface of the circuit board.
21. The semiconductor device of claim 20 , wherein:
the conductive member comprises a pillar.
22. The semiconductor device of claim 20 , wherein:
the second surface of the first chip is exposed to the outside of the semiconductor device.
23. The semiconductor device of claim 20 , wherein:
the first die comprises a semiconductor material.
24. The semiconductor device of claim 20 , wherein the semiconductor device further comprises an under fill contacting the first surface of the first die, and wherein the second encapsulant surrounds the under fill.
25. The semiconductor device of claim 20 , wherein the first encapsulant comprises a first mold compound and the second encapsulant comprises a second mold compound, and wherein a side surface of the first encapsulant and a side surface of the second encapsulant are vertical.
26. The semiconductor device of claim 20 , wherein the first encapsulant contacts the second surface of the first chip, and the semiconductor device further comprises an under fill contacting the first surface of the first die, wherein the under fill is a different material than the second encapsulant.