Low resistance contact structures for trench structures
An electrical device including at least one contact surface and an interlevel dielectric layer present atop the electrical device, wherein the interlevel dielectric layer includes at least one trench to the at least one contact surface of the electrical device. A conformal titanium liner is present on the sidewalls of the trench and is in direct contact with the at least one contact surface. The conformal titanium liner may be composed of 100 wt. % titanium, and may have a thickness ranging from 10 Å to 100 Å.
1. A semiconductor device comprising:
a fin structure providing a channel region of the semiconductor device, wherein source and drain regions that are positioned on opposing sides of the channel region are present on source and drain portions of the fin structure;
a gate structure on the channel region of the semiconductor device; and
a contact to at least one of the source and drain regions, the contact including a conformal titanium liner that is present on the sidewalls of a trench through an interlevel dielectric to the source and drain regions, and a metal fill of ruthenium (Ru) filling a remainder of the trench atop the conformal titanium liner, wherein the contact provided by a combination of the conformal titanium liner and the metal fill have a resistance of 45 micro ohms per cm or less.
2. The semiconductor device of claim 1 , wherein the conformal titanium liner comprises substantially 100 wt. % titanium.
3. The semiconductor device of claim 1 , wherein the conformal titanium liner comprises a thickness ranging from 10 Å to 100 Å.
4. The semiconductor device of claim 1 , wherein the conformal titanium liner is in direct contact with the source and drain regions, and the metal fill is in direct contact with the conformal titanium liner, wherein the trench is entirely filled by the conformal titanium liner and the metal fill.
5. The semiconductor device of claim 1 , wherein the semiconductor device comprises a field effect transistor.
6. The semiconductor device of claim 5 , wherein a channel region of the field effect transistor is provided by a fin structure.
7. The semiconductor device of claim 6 , wherein a contact surface is provided by source and drain region portions of the field effect transistor that are present on portions of the fin structure at opposing sides of the channel region.
8. The semiconductor device of claim 7 , wherein the contact surface comprises a metal semiconductor alloy region that is in direct contact with the conformal titanium liner.
9. The semiconductor device of claim 8 , wherein the metal semiconductor alloy is a silicide.
10. A semiconductor device comprising:
a fin structure providing a channel region of the semiconductor device, wherein source and drain regions that are positioned on opposing sides of the channel region are present on source and drain portions of the fin structure;
a gate structure on the channel region of the semiconductor device; and
a contact to at least one of the source and drain regions, the contact including a conformal titanium liner of substantially 100 wt. % titanium that is present on the sidewalls of a trench through an interlevel dielectric to the source and drain regions, and a metal fill of ruthenium (Ru) filling a remainder of the trench atop the conformal titanium liner, wherein a contact provided by a combination of the conformal titanium liner and the metal fill have a resistance of 45 micro ohms per cm or less.
11. The semiconductor device of claim 10 , wherein the conformal titanium liner comprises a thickness ranging from 10 Å to 100 Å.
12. The semiconductor device of claim 10 , wherein the conformal titanium liner is in direct contact with the source and drain regions, and the metal fill is in direct contact with the conformal titanium liner.
13. The semiconductor device of claim 12 , wherein the trench is entirely filled by the conformal titanium liner and the metal fill.
14. The semiconductor device of claim 12 , wherein a contact surface is provided by source and drain region portions of a field effect transistor that are present on portions of the fin structure at opposing sides of the channel region.
15. The semiconductor device of claim 14 , wherein the contact surface comprises a metal semiconductor alloy region that is in direct contact with the conformal titanium liner.
16. The semiconductor device of claim 14 , wherein the metal semiconductor alloy is a silicide.