Flexible electronic devices
The present disclosure is related to display panels, especially to flexible electronic devices. By means of adding an inorganic membrane with surface roughness between a bonding layer and a PI film, in order to effectively improve the dimensional stability of plastic substrate and the water/oxygen barrier property of flexible substrate during the PI film fabrication and the follow-up process, improving the yield of good products and prolonging the working life thereof.
1. A flexible electronic device, comprising:
(a) a substrate;
(b) a separating layer partly covering the substrate;
(c) an inorganic membrane, having a rough upper surface, covering side walls and an upper surface of the separating layer, and covering an exposed upper surface of the substrate;
(d) a display device substrate covering side walls and an upper surface of the inorganic membrane, and partly covering an exposed upper surface of the substrate;
(e) electronic components configured on surface of the display device substrate.
2. The flexible electronic device as disclosed in claim 1 , wherein the inorganic membrane is a membrane formed by means of Plasma Enhanced Chemical Vapor Deposition process.
3. The flexible electronic device as disclosed in claim 1 , wherein the inorganic membrane is a membrane which is quickly formed by means of Plasma Excitation Power, at a temperature lower than 200° C., with mixed gas including silane predominates.
4. The flexible electronic device as disclosed in claim 1 , wherein a thickness of the inorganic membrane is less than 300 nm.
5. The flexible electronic device as disclosed in claim 1 , wherein the material of the inorganic membrane is amorphous silicon or silicon nitride.
6. The flexible electronic device as disclosed in claim 1 , wherein adhesive force between the separating layer and the substrate is less than a preconfigured value.
7. A flexible electronic device as disclosed in claim 1 , wherein the separating layer is double side adhesive material.
8. The flexible electronic device as disclosed in claim 1 , wherein the roughness of the upper surface of the inorganic membrane is no less than Rz 0.2 μm and no more than Rz 0.3 μm.
9. The flexible electronic device as disclosed in claim 1 , wherein a material of the substrate is glass.