Photoresist pattern trimming methods

1. A method of trimming a photoresist pattern, comprising in sequence:

(a) providing a semiconductor substrate comprising one or more layers to be patterned on an upper surface thereof;

(b) forming a photoresist pattern on the one or more layers to be patterned, wherein the photoresist pattern comprises a plurality of features and is formed from a chemically amplified photoresist composition, the photoresist pattern comprising a matrix polymer having acid labile groups;

(c) coating a photoresist trimming composition over the photoresist pattern, wherein the trimming composition comprises a matrix polymer, a free acid having fluorine substitution and a solvent, wherein the free acid is a distinct component of the photoresist trimming composition from the matrix polymer, and wherein the trimming composition is free of cross-linking agents;

(d) heating the coated semiconductor substrate, thereby causing a change in polarity of the photoresist matrix polymer in a surface region of the photoresist pattern; and

(e) contacting the photoresist pattern with a developing solution to remove the surface region of the photoresist pattern.

2. The method of claim 1 , wherein the solvent of the photoresist trimming composition is chosen from water, organic solvents and mixtures thereof.

3. The method of claim 2 , wherein the solvent of the photoresist trimming composition is chosen from alkanes, alcohols, ethers, esters, ketones and mixtures thereof.

4. The method of claim 1 , wherein the matrix polymer of the photoresist trimming composition is soluble in aqueous alkaline developer.

5. The method of claim 1 , wherein the developing solution is an aqueous tetramethylammonium hydroxide solution.

6. The method of claim 1 , wherein the matrix polymer contains functional groups selected from —OH, —COOH, —SO3H, —SiOH, hydroxyl styrene, hydroxyl naphthalene, sulfonamide, hexafluoroisopropyl alcohol, anhydrate, lactone, ester, ether, allylamine, pyrolidone.

7. The method of claim 1 , wherein the trimming composition further comprises a compound comprising functional groups chosen from —OH, —NH, —SH, ketones, aldehydes, —SiX wherein X is chosen from halogens, vinyl ethers and combinations thereof, and combinations thereof.

8. The method of claim 1 , wherein the plurality of features of the photoresist pattern comprise a plurality of lines or posts having a duty ratio of 1:1 or more before trimming and 1:3 or less sense after trimming.

9. The method of claim 8 , wherein the plurality of features of the photoresist pattern comprise a plurality of posts.

10. The method of any of claim 1 , further comprising:

(f) forming sidewall spacers on the trimmed photoresist pattern after contacting the photoresist pattern with the developing solution; and

(g) removing the trimmed photoresist pattern, leaving sidewall spacers on the one or more layers to be patterned.

11. The method of claim 1 , wherein the free acid is an aromatic acid.

12. The method of claim 11 , wherein the free acid is chosen from one or more of the following free acids:

13. The method of claim 1 , wherein the free acid is a non-aromatic acid.

14. The method of claim 13 , wherein the non-aromatic acid has at least one fluorine substituent at the alpha position of the acid group.

15. The method of claim 1 , wherein the free acid is a sulfonic acid.

16. The method of claim 15 , wherein the free acid is chosen from one or more of the following free acids: CF 3 SO 3 H, C 4 F 9 SO 3 H, CH 3 CH 2 CF 2 CF 2 SO 3 H and HOCH 2 CH 2 CF 2 CF 2 SO 3 H.

17. The method of claim 15 , wherein the free acid is chosen from one or more of the following free acids:

18. The method of claim 1 , wherein the free acid is chosen from one or more of the following free acids: