Methods of producing uniform intrinsic layer
A photovoltaic device includes an intrinsic layer having two or more sublayers. The sublayers are intentionally deposited to include complementary concave and convex shapes. The sum of these layers resulting in a relatively flat surface for deposition of n- or p-doped layers. The photovoltaic device is optionally bifacial.
1. A method of producing a photovoltaic device, the method comprising:
receiving a first wafer substrate;
depositing a first absorber layer on the first wafer substrate, the deposition being performed to produce a curvature across the first absorber layer;
depositing a second absorber layer on the first absorber layer, the deposition being performed to produce a complimentary curvature across the second absorber layer at an interface between the first and second absorber layers;
depositing a first doped layer on the second absorber layer, wherein the curvature across the first absorber layer and the complimentary curvature across the second absorber layer in combination result in a first boundary between the second absorber layer and the first doped layer being flatter than the interface between the first absorber layer and the second absorber layer; and
depositing a first transparent conductive layer on the first doped layer.
2. The method of claim 1 , further comprising:
depositing a third absorber layer on a side of the wafer substrate opposite the first absorber layer;
depositing a fourth absorber layer on the third absorber layer;
depositing a second doped layer on the fourth absorber layer, wherein deposition of the fourth absorber layer is performed such that a side of the fourth absorber layer proximate to the second doped layer is flatter than a side of the fourth absorber layer proximate to the third absorber layer.
3. The method of claim 2 , further comprising depositing a second transparent conductive layer on the second doped layer.
4. The method of claim 2 , further comprising depositing a reflective transparent conductive layer on the second doped layer.
5. The method of claim 1 , wherein the first absorber layer is convex and the second absorber layer is concave.
6. The method of claim 1 , wherein the first absorber layer is concave and the second absorber layer is convex.
7. The method of claim 1 , wherein the second absorber layer has a greater refractive index than the first absorber layer.
8. The method of claim 1 , wherein the first absorber layer is deposited using conditions to make the first absorber layer concave.
9. The method of claim 1 , wherein the first absorber layer is deposited using conditions to make the first absorber layer convex.
10. The method of claim 1 , further comprising texturing the substrate wafer.
11. The method of claim 1 , further comprising receiving at least a second wafer substrate, wherein the step of depositing the first absorber layer is performed on both the first and second wafer substrates at the same time.
12. The method of claim 11 , wherein a part of the first wafer substrate is at least 15 cm from a part of the second wafer substrate during the step of depositing the first absorber layer.
13. The method of claim 11 , wherein a part of the first wafer substrate is at least 25 cm from a part of the second wafer substrate during the step of depositing the first absorber layer.
14. The method of claim 11 , wherein the step of depositing the second absorber layer is performed on both the first and second wafer substrates in a same reaction chamber in a batch process.
15. The method of claim 11 , wherein the step of deposing the first absorber layer is performed on at least 9 wafer substrates at the same time in a batch process.
16. The method of claim 11 , wherein the first and second wafer substrates are disposed on a same platform during the step of depositing the first absorber layer.
17. The method of claim 16 , wherein the platform is configured to hold at least 16 wafer substrates in a reaction chamber at the same time.
18. The method of claim 1 , wherein the curvature across the first absorber layer includes a curvature across multiple wafer substrates.
19. The method of claim 18 , wherein the curvature across the first absorber layer is over a length of at least 25 cm.
20. The method of claim 18 , wherein the curvature across multiple wafer substrates includes at least 9 wafer substrates processed at the same time.
21. The method of claim 1 , wherein the second absorber layer includes a seed material configured for depositing the first doped layer.
22. The method of claim 1 , wherein the first doped layer is p-doped or n-doped.