Low power barrier modulated cell for storage class memory
View Patent ↗Systems and methods for providing a Barrier Modulated Cell (BMC) structure that may comprise a reversible resistance-switching memory element within a memory array are described. The BMC structure may include a barrier layer comprising a layer of amorphous germanium or amorphous silicon germanium paired with a conductive metal oxide, such as titanium dioxide (TiO2), strontium titanate (SrTiO3), or a binary metal oxide. The BMC structure may include a conductive metal oxide in series with an amorphous layer of a low bandgap material. The low bandgap material may comprise a semiconductor material with a bandgap energy (Eg) less than 1.0 eV. The improved BMC structure may be used for providing multi-level memory elements within a three dimensional memory array.
1. A memory structure, comprising:
a bit line;
a first word line; and
a first memory cell arranged between the first word line and the bit line, the first memory cell includes a conductive metal oxide in series with an amorphous layer of a semiconductor material that has a bandgap energy less than the bandgap energy of silicon, the amorphous layer of the semiconductor material comprises one of an amorphous layer of germanium or an amorphous layer of silicon germanium.
2. The memory structure of claim 1 , further comprising:
a diode in series with the first memory cell arranged between the first word line and the bit line.
3. The memory structure of claim 1 , wherein:
the first memory cell includes the amorphous layer of germanium and the amorphous layer of silicon germanium.
4. The memory structure of claim 1 , wherein:
the conductive metal oxide comprises titanium dioxide.
5. The memory structure of claim 1 , wherein:
the conductive metal oxide comprises strontium titanate.
6. The memory structure of claim 1 , further comprising:
a second memory cell arranged between a second word line and the bit line, the second word line is arranged above the first word line, the second memory cell includes the conductive metal oxide in series with one of a layer of germanium or a layer of silicon germanium.
7. The memory structure of claim 6 , wherein:
the first memory cell comprises a multi-level memory cell; and
the bit line comprises a vertical bit line arranged orthogonal to a surface of a substrate.
8. The memory structure of claim 1 , wherein:
the bit line comprises tungsten; and
the first word line comprises titanium nitride.
9. An apparatus, comprising:
a memory array including a first word line and a bit line, the memory array includes a first memory cell arranged between the first word line and the bit line, the first memory cell comprises a conductive metal oxide in series with an amorphous layer of a semiconductor material, the amorphous layer of the semiconductor material comprises one of an amorphous layer of germanium or an amorphous layer of silicon germanium; and
one or more control circuits configured to bias the first word line and the bit line during a memory operation.
10. The apparatus of claim 9 , further comprising:
a diode in series with the first memory cell arranged between the first word line and the bit line; and
the first memory cell includes the amorphous layer of germanium and the amorphous layer of silicon germanium.
11. The apparatus of claim 9 , wherein:
the conductive metal oxide comprises titanium dioxide.
12. The apparatus of claim 9 , wherein:
the conductive metal oxide comprises strontium titanate.
13. The apparatus of claim 9 , wherein:
the first memory cell comprises a multi-level memory cell; and
the bit line comprises a vertical bit line arranged orthogonal to a surface of a substrate.