Metal fill optimization for self-aligned double patterning
A technique relates to a method of optimizing self-aligned double patterning. Predefined locations for required metal cuts are provided in order to form metal wires from metal fills that have been cut. Extended locations for extended metal cuts are provided in order to cut adjacent metal fills. The adjacent metal fills are the metal fills that are adjacent to the predefined locations for the required metal cuts, and the extended metal cuts extend beyond the required metal cuts. The required metal cuts into the metal fills are performed and the extended metal cuts into the adjacent metal fills are performed.
1. A method of optimizing self-aligned double patterning, the method comprising:
providing predefined locations for required metal cuts in order to form metal wires from metal fills that have been cut;
prioritizing the metal wires, such that a highest priority to a lowest priority is determined for the metal wires;
expanding the predefined locations for the required metal cuts to have extended locations for extended metal cuts in order to cut adjacent metal fills, the adjacent metal fills being the metal fills that are adjacent to the predefined locations for the required metal cuts, wherein the extended metal cuts extend beyond the required metal cuts, wherein the metal wires having been prioritized from the highest priority to the lowest priority are associated with the extended locations for the extended metal cuts because the extended locations are expanded from the predefined locations;
performing a check on the extended locations for the extended metal cuts in an order of the highest priority to the lowest priority of the extended locations for the extended metal cuts, such that a probability of having to remove the extended locations associated with the metal wires having a higher priority is smaller than having to remove the extended locations associated with the metal wires having a lower priority; and
performing the required metal cuts into the metal fills and the extended metal cuts into the adjacent metal fills.
2. The method of claim 1 , further comprising removing the extended locations for the extended metal cuts that violate design rules.
3. The method of claim 2 , further comprising for a given extended location for a given extended metal cut that violates any design rules with respect to a given cut, utilizing a first mask to make the given extended metal cut and a second mask to make the given cut, thereby avoiding violating the any design rules.
4. The method of claim 1 , wherein the required metal cuts into the metal fills and the extended metal cuts into the adjacent metal fills are both performed simultaneously.
5. The method of claim 1 , wherein the extended metal cuts into the adjacent metal fills reduce parasitic capacitance.
6. The method of claim 1 , wherein the adjacent metal fills are adjacent to the metal wires having been formed by the required metal cuts at the predefined locations; and
wherein a given adjacent metal fill for a given metal wire is not on a same row as the given metal wire.
7. The method of claim 1 , wherein:
a given predefined location is in a first row, the given predefined location being for a given required metal cut to form a given metal wire from a given metal fill; and
a given extended location is in a second row, the given extended location being for a given extended metal cut to cut a given adjacent metal fill.
8. The method of claim 7 , wherein the given extended location for the given extended metal cut is aligned to the given predefined location for the given required metal cut, such that the given extended metal cut is aligned to the given required metal cut.
9. The method of claim 1 , further comprising performing an additional cut on the adjacent metal fills having a length greater than a predefined length, in order to reduce parasitic capacitance affecting the metal wires adjacent to the adjacent metal fills.