Press fitting head and semiconductor manufacturing apparatus using the same
A press fitting head comprising an elastic member in a part where the press fitting head contacts a semiconductor device, and an alignment mark recognition area capable of detecting an optically readable marker provided on a surface to be contacted to the semiconductor device is provided. Additionally, a semiconductor manufacturing apparatus in which the press fitting head is applied is provided.
1. A press fitting head comprising:
an elastic member in a part where the press fitting head contacts a semiconductor device; and
an alignment mark recognition area for detecting an optically readable marker provided on a surface to be contacted of the semiconductor device.
2. The press fitting head according to claim 1 , wherein:
the elastic member has a notch portion; and
the alignment mark recognition area coincides with the notch portion.
3. The press fitting head according to claim 1 , wherein:
the elastic member has an opening portion; and
the alignment mark recognition area coincides with the opening portion.
4. The press fitting head according to claim 3 , wherein the opening portion is coupled with a vacuum generator.
5. The press fitting head according to claim 1 , further comprising a transparent portion configured to fix the elastic member.