Ephemeral bonding
View Patent ↗Compositions containing an adhesive material and a release additive are suitable for temporarily bonding two surfaces, such as a wafer active side and a substrate. These compositions are useful in the manufacture of electronic devices where a component, such as an active wafer, is temporarily bonded to a substrate, followed by further processing of the active wafer.
1. A composition comprising a curable adhesive material and a polyether release additive, wherein the polyether release additive is free of silicon, wherein the polyether release additive is not completely soluble in the curable adhesive material, and wherein the polyether release additive phase separates from the adhesive material during curing of the adhesive material.
2. The composition of claim 1 wherein the curable adhesive material is chosen from polyarylene oligomers, cyclic-olefin oligomers, arylcyclobutene oligomers, vinyl aromatic oligomers, and mixtures thereof.
3. The composition of claim 2 wherein the curable adhesive material is chosen from arylcyclobutene oligomers.
4. The composition of claim 1 wherein the polyether release additive is chosen from the group consisting of polyalkylene oxide homopolymers and polyalkylene oxide copolymers.
5. The composition of claim 1 wherein the polyether release additive comprises terminal groups chosen from the group consisting of hydroxy, alkoxy, aryloxy, and mixtures thereof.
6. The composition of claim 1 wherein the polyether release additive is chosen from polyethylene glycol, polypropyleneglycol, poly(1,3-propanediol), polybutyleneglycol, poly(tetrahydrofuran), ethylene glycol-propylene glycol copolymers, and mixtures thereof.
7. The composition of claim 1 wherein after curing of the adhesive material, the release additive is relatively more hydrophilic than the cured adhesive material.
8. The composition of claim 1 further comprising an organic solvent.