Aqueous compositions of stabilized aminosilane group containing silica particles
The present invention provides aqueous chemical mechanical planarization (CMP) polishing compositions have excellent heat aging and shelf stability in the form of concentrates comprising a mixture of a compound containing two quaternary ammonium groups, such as hexabutyl C 1 -C 8 alkanediammonium dihydroxides or salts thereof, preferably N,N,N,N′,N′,N′-hexabutyl-1,4-butanediammonium dihydroxide (HBBAH), and aminosilane group containing silica particles in the amount of from 1 to 30 wt. % or, preferably, from 15 to 22 wt. %, as solids based on the total weight of the composition, the composition having a pH ranging from 3 to 5 or, preferably, from 3.5 to 4.5 wherein the composition is stable against visible precipitation or sedimentation at a 15 wt. % solids content after heat aging at a temperature of 45° C. for at least 6 days.
1. An aqueous chemical mechanical planarization (CMP) polishing composition comprising a mixture of a compound containing two quaternary ammonium groups, and aminosilane group containing silica particles containing one or more cationic nitrogen atom in the amount of from 1 to 30 wt. % as solids, based on the total weight of the composition, the composition having a pH ranging from 3 to 5, wherein the total amount of cationic nitrogen atoms from the aminosilane on the silica particles and the compound containing two quaternary ammonium groups ranges from 170 to 500 nM/m 2 silica particles in the aqueous CMP polishing composition, and, further wherein, the composition is stable against visible precipitation or sedimentation at a 15 wt. % solids content after heat aging at a temperature of 45° C. for at least 6 days.
2. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , wherein the compound containing two quaternary ammonium groups is chosen from hexabutyl C 1 -C 8 alkanediammonium dihydroxides or salts thereof and the composition comprises no oxidizer compound.
3. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 2 , wherein the compound containing two quaternary ammonium groups is N,N,N,N′,N′,N′-hexabutyl-1,4-butanediammonium dihydroxide (HBBAH).
4. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , wherein the aminosilane group containing silica particles comprise an aminosilane containing one or more tertiary amine groups or one or more secondary amine groups.
5. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 4 , wherein the aminosilane group containing silica particles comprise an aminosilane containing one or more tertiary amino group which is N,N-(diethylaminomethyl)triethoxysilane (DEAMS)).
6. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , wherein the amount of aminosilane in nanomoles of cationic nitrogen atoms on the silica particle per square meter of silica particle surface area (nM/m 2 silica) ranges from 70 to 500 nM/m 2 silica in the aqueous CMP polishing composition.
7. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 6 , wherein the amount of aminosilane ranges from 100 to 300 nM/m 2 silica.
8. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , wherein the amount of the compound containing two quaternary ammonium groups ranges from 18 to 100 nM of the compound containing two quaternary ammonium groups per m 2 of the silica particles (nM/m 2 silica) in the aqueous CMP polishing composition.
9. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , further comprising a buffer, which is a carboxylate of a (di)carboxylic acid having a pKa of 3 to 7 in the amount of from 0 to 50 millimoles per kg of the total composition.
10. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , wherein the composition comprises aminosilane group containing silica particles in the amount of from 15 to 22 wt. %, as solids, based on the total weight of the composition.
11. The aqueous chemical mechanical planarization (CMP) polishing composition as claimed in claim 1 , wherein the compositions comprise no oxidizer compound.