Microphone and method of manufacturing a microphone
View Patent ↗A microphone and a method for manufacturing a microphone are disclosed. In an embodiment the microphone includes a substrate, a transducer element defining a front volume and a lid arranged such that the transducer element is arranged between the substrate and the lid, wherein the lid comprises an opening which is arranged non-overlapping to the front volume of the transducer element. The microphone further includes an insert arranged between the lid and the transducer element, wherein the insert includes a path which connects the front volume of the transducer element to the opening of the lid.
1. A microphone comprising:
a substrate;
a transducer element defining a front volume;
a lid arranged such that the transducer element is arranged between the substrate and the lid, wherein the lid comprises an opening which is arranged non-overlapping to the front volume of the transducer element; and
an insert arranged between the lid and the transducer element, wherein the insert comprises a path connecting the front volume of the transducer element to the opening of the lid, wherein the insert is a pre-cast insert or an injection molded insert, and wherein the opening of the lid is arranged so that the opening of the lid is non-overlapping with the transducer element;
wherein the path consists of a first end overlapping with the front volume of the transducer element, a second end overlapping with the opening of the lid and a middle section connecting the first and the second end of the path such that the first end and the second end are arranged at a distance to each other, and
wherein the middle section consists of an opening extending through the insert in a direction parallel to the substrate free of any turns.
2. The microphone according to claim 1 , wherein the insert has a lower module of elasticity than the lid.
3. The microphone according to claim 1 , wherein the insert comprises a silicone rubber.
4. The microphone according to claim 1 , wherein the insert comprises a polymer.
5. The microphone according to claim 1 , wherein a back volume of the transducer element is enclosed by the transducer element, the lid, the insert and the substrate.
6. The microphone according to claim 1 , wherein the insert is fixed to the lid.
7. The microphone according to claim 1 , wherein the insert covers the transducer element.
8. A method for manufacturing a microphone, the method comprising:
arranging a transducer element on a substrate, wherein the transducer element defines a front volume;
fixing an insert to a lid, wherein the lid comprises an opening, wherein the insert comprises a path, wherein the insert is fixed to the lid such that the path is connected to the opening, and wherein the insert is a pre-cast insert or an injection molded insert; and
fixing the lid with the insert fixed thereto to the substrate such that the transducer element is arranged between the lid and the substrate and such that the path connects the front volume of the transducer element to the opening, and such that wherein the opening of the lid is non-overlapping with the transducer element;
wherein the path consists of a first end overlapping with the front volume of the transducer element, a second end overlapping with the opening of the lid and a middle section connecting the first and the second end of the path such that the first end and the second end are arranged at a distance to each other; and
wherein the middle section consists of an opening extending through the insert in a direction parallel to the substrate free of any turns.
9. The method according to claim 8 , wherein the lid with the insert thereto is fixed to the substrate such that the opening of the lid is arranged non-overlapping to the front volume of the transducer element.
10. The method according to claim 8 , wherein the insert is fixed to the lid by gluing.