Bonding apparatus and method of estimating position of landing point of bonding tool
A bonding apparatus 10 having a diagonal optical system 30 , the bonding apparatus moves a capillary 24 down to a first heightwise position to calculate a position A11 of a tip end portion of the capillary 24 and a position A12 of a tip end portion of the capillary in an image on an imaging plane of the diagonal optical system 30 , and similarly moves the capillary 24 down to a further lower second heightwise position to calculate a position A21 of the tip end portion of the capillary 24 and a position A22 of the tip end portion of the capillary in the image on the imaging plane. The bonding apparatus then estimates the position of the landing point of the capillary 24 on a bonding target 8 based on positional data for the four calculated positions A11, A12, A21, and A22, the first heightwise position, and the second heightwise position. With this, it is possible to use the diagonal optical system in the bonding apparatus to further improve positional accuracy in the bonding process.
1. A bonding apparatus, comprising:
a bonding tool attached to a bonding head;
a stage configured to move the bonding head slidably in an XY direction;
a Z-movement mechanism configured to move the bonding tool freely in a Z direction perpendicular to an XY plane;
a bonding stage for holding a bonding target;
a rail disposed under the bonding tool and adjacent to the bonding stage
wherein an edge of the rail is parallel and perpendicular to an edge of the bonding stage;
a mirror coupled to a top surface of the rail,
wherein a top surface of the mirror is parallel to a top surface of the bonding target, and
wherein the top surface of the mirror comprises a reference mark;
a diagonal optical system having an imaging camera configured to observe the bonding tool and the mirror from an obliquely upward position,
wherein the imaging camera is located a fixed offset distance from the bonding tool, and
wherein the imaging camera is fixed at a predetermined angle toward a tip end portion of the bonding tool for simultaneously imaging the reference mark, the tip end portion, and a reflection of the tip end portion in the mirror;
the bonding apparatus performs bonding on the bonding target by:
detecting the position of the reference mark;
performing offset movement of the bonding tool in a direction of the mirror;
moving the bonding tool to a first height above the mirror;
detecting a first position of the tip end portion and a second position of an image of the tip end portion in the mirror using the imaging camera;
moving the bonding tool to a second height above the mirror,
wherein the first height is greater than the second height;
detecting a third position of the tip end portion and a fourth position of an image of the tip end portion in the mirror using the imaging camera; and
estimating a position of a landing point based on the detected first position, second position, third position, and fourth position.
2. The bonding apparatus according to claim 1 , wherein a control unit estimates the position of the landing point.
3. The bonding apparatus according to claim 1 , wherein
the bonding tool is one of a capillary that performs a wire bonding process, a tool that performs a die bonding process, and a tool that performs a flip-chip mounting process.
4. The bonding apparatus according to claim 1 , wherein
the diagonal optical system adjusts an optical length of one of the tip end portion of the bonding tool and the tip end portion of the bonding tool in the image received on the mirror so that the optical length becomes identical with an optical length of the other.
5. The bonding apparatus according to claim 2 , wherein the control unit detects a change in a bonding offset generated during bonding based on a difference between a position of the reference mark and the estimated position of the landing point.
6. The bonding apparatus according to claim 1 , wherein
the control unit performs bonding by feeding back the detected change in the bonding offset.