Semiconductor package with EMI shield and fabricating method thereof
A semiconductor device with EMI shield and a fabricating method thereof are provided. In one embodiment, the semiconductor device includes EMI shield on all six surfaces of the semiconductor device without the use of a discrete EMI lid.
1. A method for shielding a semiconductor device, the method comprising:
attaching a first carrier to a bottom surface of the semiconductor device, the semiconductor device further comprising:
a top surface opposite the bottom surface of the semiconductor device; and
side surfaces adjoining the top surface to the bottom surface;
forming an external electromagnetic interference (EMI) shield on the top surface and the side surfaces of the semiconductor device, while the bottom surface of the semiconductor device is covered by the first carrier;
attaching a second carrier to the external EMI shield along the top surface of the semiconductor device;
after attaching the second carrier, removing the first carrier from the bottom surface of the semiconductor device; and
forming an external bottom EMI shield on the bottom surface of the semiconductor device while the top surface of the semiconductor device is covered by the second carrier.
2. The method according to claim 1 , comprising attaching an electrical interconnect to the semiconductor device.
3. The method according to claim 2 , wherein the electrical interconnect is electrically connected to the external EMI shield and the external bottom EMI shield.
4. The method according to claim 2 , comprising:
forming an opening through the external bottom EMI shield that exposes a pad of a substrate to which a semiconductor die of the semiconductor device is operatively coupled, said forming the opening comprising removing a portion of the external bottom EMI shield and a portion of a bottom encapsulant that covers the substrate;
wherein said attaching the electrical interconnect comprises attaching the electrical interconnect to the pad through the opening.
5. The method according to claim 4 , wherein said forming the opening comprises utilizing a laser to form the opening.
6. The method according to claim 4 , wherein said forming the opening comprises:
forming a first depression; and
forming a second depression, wherein the second depression is narrower than the first depression and exposes the pad.
7. The method according to claim 4 , comprising backfilling the opening after said attaching the electrical interconnect to the pad.
8. The method according to claim 1 , wherein:
said forming the external EMI shield comprises utilizing sputtering to form at least a portion of the external EMI shield; and
said forming the external bottom EMI shield comprises utilizing sputtering to form at least a portion of the external bottom EMI shield.
9. The method according to claim 1 , comprising removing a portion of a top encapsulant covering a plurality of semiconductor dies of the semiconductor device to form a space between two semiconductor dies of the plurality of semiconductor dies.
10. The method according to claim 9 , comprising forming an internal EMI shield in the space between the two semiconductor dies.
11. The method according to claim 10 , wherein said forming the internal EMI shield comprises utilizing sputtering to form the internal EMI shield.
12. The method according to claim 10 , wherein the internal EMI shield is electrically connected to the external EMI shield and the external bottom EMI shield.
13. The method according to claim 2 , wherein the electrical interconnect is electrically coupled to the external bottom EMI shield.
14. The method according to claim 2 , wherein the electrical interconnect is a solder ball.
15. The method according to claim 2 , comprising forming an opening by removing a portion of the external bottom EMI shield and a portion of a bottom encapsulant covering a substrate of the semiconductor device.
16. The method according to claim 15 , wherein the opening comprises a volume of space not occupied by the electrical interconnect.
17. The method according to claim 16 , comprising backfilling the volume of space to form a backfilled bottom surface that is substantially co-planar with the bottom surface of the bottom encapsulant.
18. A method for forming a shielded semiconductor package, the method comprising:
forming an external electromagnetic interference (EMI) shield for a semiconductor package that comprises at least one semiconductor die coupled to an upper surface of a substrate, wherein the external EMI shield covers all external surfaces of the semiconductor package;
removing a portion of the external EMI shield and a portion of an encapsulant covering a lower surface of the substrate opposite the upper surface to form an opening to a pad on the lower surface of the substrate; and
attaching an electrical interconnect to the pad via the opening.
19. The method of claim 18 , comprising, prior to said forming the external EMI shield, forming an internal EMI shield between a first semiconductor die of the at least one semiconductor dies and a second semiconductor die of the at least one semiconductor dies.
20. The method of claim 19 , comprising electrically connecting the external EMI shield to one or both of the internal EMI shield and the electrical interconnect.