Nanowire structures having non-discrete source and drain regions
Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
1. A semiconductor device, comprising:
a semiconductor nanowire disposed horizontally above a substrate, the semiconductor nanowire comprising a discrete channel region;
a gate electrode stack surrounding the discrete channel region of the semiconductor nanowire;
source and drain regions disposed on either side of the discrete channel region of the semiconductor nanowire, wherein each of the source and drain regions comprises a first semiconductor material and a second semiconductor material, the first semiconductor material the same as the discrete channel region of the semiconductor nanowire, and the second semiconductor material different than the first semiconductor material, wherein the first semiconductor material of each of the source and drain regions has a top surface, side surfaces and a bottom surface, and wherein the second semiconductor material on the top surface, the side surfaces and the bottom surface of the first semiconductor material; and
a pair of spacers disposed between the gate electrode stack and the source and drain regions, wherein each of the pair of spacers only partially surrounds a portion of the semiconductor nanowire.
2. The semiconductor device of claim 1 , further comprising:
a pair of contacts, each contact disposed on one of the source and drain regions.
3. The semiconductor device of claim 2 , wherein each contact completely surrounds the respective source or drain region.
4. The semiconductor device of claim 2 , wherein each contact only partially surrounds the respective source or drain region.
5. The semiconductor device of claim 1 , wherein the first and second semiconductor materials are merged, the semiconductor regions further comprising a dopant species.
6. The semiconductor device of claim 5 , wherein the first semiconductor material is silicon germanium, the second semiconductor material is silicon, and the dopant species is a P-type dopant species.
7. The semiconductor device of claim 5 , wherein the first semiconductor material is silicon, the second semiconductor material is silicon germanium, and the dopant species is an N-type dopant species.
8. The semiconductor device of claim 1 , wherein the gate electrode stack comprises a metal gate and a high-K gate dielectric.
9. A computing device, comprising:
a board; and
a component coupled to the board, the component including an integrated circuit structure, comprising:
a semiconductor nanowire disposed horizontally above a substrate, the semiconductor nanowire comprising a discrete channel region;
a gate electrode stack surrounding the discrete channel region of the semiconductor nanowire;
source and drain regions disposed on either side of the discrete channel region of the semiconductor nanowire, wherein each of the source and drain regions comprises a first semiconductor material and a second semiconductor material, the first semiconductor material the same as the discrete channel region of the semiconductor nanowire, and the second semiconductor material different than the first semiconductor material, wherein the first semiconductor material of each of the source and drain regions has a top surface, side surfaces and a bottom surface, and wherein the second semiconductor material on the top surface, the side surfaces and the bottom surface of the first semiconductor material; and
a pair of spacers disposed between the gate electrode stack and the source and drain regions, wherein each of the pair of spacers only partially surrounds a portion of the semiconductor nanowire.
10. The computing device of claim 9 , further comprising:
a memory coupled to the board.
11. The computing device of claim 9 , further comprising:
a communication chip coupled to the board.
12. The computing device of claim 9 , further comprising:
a camera coupled to the board.
13. The computing device of claim 9 , further comprising:
a battery coupled to the board.
14. The computing device of claim 9 , further comprising:
an antenna coupled to the board.
15. The computing device of claim 9 , wherein the component is a packaged integrated circuit die.
16. The computing device of claim 9 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.
17. The computing device of claim 9 , wherein the computing device is selected from the group consisting of a mobile phone, a laptop, a desk top computer, a server, and a set-top box.