Approach to bottom dielectric isolation for vertical transport fin field effect transistors
A vertical transport fin field effect transistor (VT FinFET), including one or more vertical fins on a surface of a substrate, an L-shaped or U-shaped spacer trough on the substrate adjacent to at least one of the one or more vertical fins, and a gate dielectric layer on the sidewalls of the at least one of the one or more vertical fins and the L-shaped or U-shaped spacer trough.
1. A semiconductor device, comprising:
one or more vertical fins on a surface of a substrate;
an L-shaped or U-shaped spacer trough on the substrate adjacent to at least one of the one or more vertical fins, wherein a sidewall of the L-shaped or U-shaped spacer trough is on a sidewall of at least one of the one or more vertical fins; and
a gate dielectric layer on the sidewall of the at least one of the one or more vertical fins and directly on a trough surface and a side and a top surface of the sidewall of the L-shaped or U-shaped spacer trough.
2. The semiconductor device of claim 1 , wherein the material of the L-shaped or U-shaped spacer trough is silicon nitride (SiN).
3. The semiconductor device of claim 1 , further comprising, a liner between the L-shaped or U-shaped spacer trough and at least one of the one or more vertical fins.
4. The semiconductor device of claim 3 , wherein the material of the liner is silicon oxide (SiO).
5. The semiconductor device of claim 3 , wherein the sidewall of the L-shaped or U-shaped spacer trough has an inside sidewall extending a height above the trough surface in the range of about 1 nm to about 5 nm.
6. The semiconductor device of claim 5 , wherein the liner is L-shaped or U-shaped.
7. The semiconductor device of claim 5 , further comprising a work function layer on the gate dielectric layer, and a gate fill layer on the work function layer to form a gate structure.
8. The semiconductor device of claim 7 , further comprising a top source/drain on the top surface of the at least one of the one or more vertical fins, and a bottom source/drain below the at least one of the one or more vertical fins.