Vertical solid-state transducers having backside terminals and associated systems and methods
View Patent ↗Vertical solid-state transducers (“SSTs”) having backside contacts are disclosed herein. An SST in accordance with a particular embodiment can include a transducer structure having a first semiconductor material at a first side of the SST, a second semiconductor material at a second side of the SST opposite the first side, and an active region between the first and second semiconductor materials. The SST can further include first and second contacts electrically coupled to the first and second semiconductor materials, respectively. A portion of the first contact can be covered by a dielectric material, and a portion can remain exposed through the dielectric material. A conductive carrier substrate can be disposed on the dielectric material. An isolating via can extend through the conductive carrier substrate to the dielectric material and surround the exposed portion of the first contact to define first and second terminals electrically accessible from the first side.
1. A method of forming solid-state transducers (SSTs) having a first side and a second side, the method comprising:
forming a transducer structure having an active region positioned between a first semiconductor material and a second semiconductor material, wherein the first semiconductor material is at the first side of the SST and the second semiconductor material is at the second side of the SST;
forming a first contact on the first side of the SST;
forming a second contact on the first side of the SST, wherein the second contact includes a plurality of interconnected buried contact elements electrically coupled to the second semiconductor material;
forming a dielectric material on the first side of the SST leaving a portion of the first contact and a portion of the second contact exposed through the dielectric material;
disposing a conductive carrier substrate on the dielectric material, wherein the conductive carrier substrate is electrically coupled to the first and second contacts; and
electrically isolating the first contact from the second contact, wherein a portion of the conductive carrier substrate defines a first terminal electrically coupled to the first contact and a portion of the conductive carrier substrate defines a second terminal electrically coupled to the second contact, and wherein the first and second electrical terminals are both exposed at the first side of the SST;
wherein electrically isolating the first contact from the second contact comprises forming an isolating via around the portion of the first contact exposed through the dielectric material, wherein the isolating via extends through the carrier substrate to the dielectric material;
wherein the isolating via is a first isolating via, and wherein the method further comprises electrically isolating the first contact from the second contact by a second isolating via around the portion of the second contact exposed through the dielectric material; and
wherein the second isolating via extends through the carrier substrate to the dielectric material.
2. The method of claim 1 , further comprising:
forming a plurality of separators that extend through the transducer structure to demarcate individual SSTs, wherein the separators project beyond the transducer structure toward the second side of the SST; and
forming discrete optical elements on the second side of the SST, wherein the separators form barriers between the discrete optical elements.
3. The method of claim 2 wherein forming the discrete optical elements comprises:
forming a first optical element on the second side of the SST, the first optical element having a first performance parameter; and
forming a second optical element on the second side of the SST, the second optical element having a second performance parameter different from the first performance parameter, wherein the first and second optical elements are separated by an adjoining separator.
4. The method of claim 2 wherein forming the discrete optical elements comprises:
forming a first discrete optical element configured to emit a first color of radiation; and
forming a second discrete optical element configured to emit a second color of radiation different from the first color, wherein the first and second optical elements are separated by an adjoining separator.
5. The method of claim 1 wherein forming the transducer structure comprises forming a transducer structure configured to emit electromagnetic radiation in at least one of the ultraviolet spectrum, the visible spectrum, and the infrared spectrum.
6. The method of claim 2 wherein at least one of the separators includes a dielectric isolator.
7. The method of claim 2 wherein at least one of the separators includes a barrier material.
8. The method of claim 2 wherein at least one of the separators includes a seed material.
9. The method of claim 1 further comprising forming a metal material on the dielectric material.
10. The method of claim 9 wherein the metal material contacts the portions of the first and second contacts that are exposed through the dielectric material.
11. The method of claim 10 wherein the metal material includes a via around at least one of the portions of the first and second contacts that are exposed through the dielectric material.