Fabrication technology for metal gate
View Patent ↗One aspect of the present disclosure is a method of fabricating metal gate by forming special layers in place of traditional TiN hard mask over the ILD0 layer to avoid ILD0 losses due to conventional ILD0 CMP. The method can comprise: after the ILD0 CMP, forming a first thin ashable film layer over the ILD0 layer; then forming a second thin dielectric layer over the first layer; during the aluminum CMP process for a first region (PMOS or NMOS), removing the second layer through polishing until the top surface of the first ashable film layer; and then removing first ashable film layer through an ashing method such as burning. In this way, ILD0 loss can be reduced during the first aluminum CMP step and thus can reduce initial height of ILD0, which in turn can reduce the height of initial dummy gate filled in the cavity.
1. A method for fabricating metal gates for a semiconductor device, the method comprising:
providing a substrate; and
providing a first metal gate type transistor region and a second metal gate type transistor region on the substrate, wherein each of the first metal gate type transistor region and second metal gate type transistor region comprise a dummy gate;
providing a zero order interlayer dielectric layer (ILD0 layer) around the first metal gate type transistor region and the second metal gate type transistor region;
forming an ashable first layer over the ILD0 layer;
forming a second layer over the first layer, the second layer comprising silicon-carbide (SiC);
performing a patterning process to remove the dummy gate in the first metal gate type transistor region and to form a first metal gate in the first metal gate type transistor region, the first metal gate being of the first metal gate type;
performing a first chemical mechanical polishing (CMP) process to polish the first metal gate in the first metal gate type transistor region, wherein the first CMP process comprises removing the second layer but not the first layer;
removing the first layer through an ashing method;
forming a hard mask layer over the ILD0 layer after the first layer is removed;
performing a patterning process to remove the dummy gate in the second metal gate type transistor region and to form a second metal gate in the second metal gate type transistor region, the second metal gate being of the second metal gate type; and
performing a chemical mechanical polishing (CMP) process to polish the second metal gate in the second metal gate type transistor region, wherein the CMP process comprises removing the hard mask layer.
2. The method of claim 1 , wherein the thickness of the first layer is between 300 angstroms to 1000 angstroms.
3. The method of claim 1 , wherein the thickness of the second layer is between 100 angstroms to 500 angstroms.
4. The method of claim 1 , wherein the first layer is removed by using a oxidizing gas.
5. The method of claim 1 , wherein the first layer comprises amorphous carbon.
6. The method of claim 1 , wherein the first metal gate type is PMOS, and the second metal gate type is NMOS.
7. The method of claim 1 , wherein the first metal gate type is NMOS, and the second metal gate type is PMOS.
8. The method of claim 1 , wherein the hard mask layer comprises titanium nitride (TiN).