Nanosheet transistors on bulk material
View Patent ↗A method of forming a semiconductor device and resulting device. The method may form a first gate on a gate region of a starting substrate. The starting substrate includes alternating sacrificial layers and semiconductor layers above a buffer sacrificial layer located on a bulk substrate. The method may remove the starting substrate located between the gates. Etching the starting substrate creates a trench into the bulk substrate. The method may form an insulating layer on the inside of the trench. The method may form a masking layer over in the trench in the starting substrate covering a portion of the insulating layer, but below a top surface of the buffer layer. The method may remove the unmasked portion of the insulating layer. The method may form a source/drain in the trench. The method may remove the buffer sacrificial layer, and the sacrificial layers in the layered nanosheet.
1. A method of forming a semiconductor device, the method comprising:
forming a first gate on a gate region of a starting substrate, wherein the starting substrate comprises a layered nanosheet above a buffer sacrificial layer, wherein the buffer sacrificial layer is located on a bulk substrate, and wherein the layered nanosheet comprises alternating sacrificial layers and semiconductor layers;
anisotropically etching the starting substrate in a source/drain region of the starting substrate, wherein etching the starting substrate creates a trench through the layered nanosheet and the buffer sacrificial layer and into the bulk substrate;
forming an insulating layer on the inside of the trench;
forming a masking layer over in the trench in the starting substrate, wherein a top surface of the masking layer is below a top surface of the buffer sacrificial layer and covering a portion of the insulating layer;
removing the unmasked portion of the insulating layer;
forming a source/drain in the trench; and
removing the buffer sacrificial layer and the sacrificial layers in the layered nanosheet.
2. The method of claim 1 further comprising removing a portion of the buffer sacrificial layer and a portion of the sacrificial layers in the gate region.
3. The method of claim 2 , wherein forming the insulating layer on the inside of the trench comprises depositing the insulating layer on a vertical surface of the buffer sacrificial layer and a vertical surface of the sacrificial layers, and wherein the vertical surface of the buffer sacrificial layer and the vertical surface of the sacrificial layers are located in the gate region.
4. The method of claim 3 , wherein removing the unmasked portion of the insulating layer comprises an anisotropic etch.
5. The method of claim 3 , wherein removing the unmasked portion of the insulating layer comprises retaining the portion of the insulating layer located beneath the first gate.
6. The method of claim 1 , wherein the first gate is a dummy gate.
7. The method of claim 6 further comprising:
removing the dummy gate;
removing the buffer sacrificial layer and the sacrificial layers in the gate region;
forming a gate dielectric in the gate region; and
forming a gate metal in the gate region.
8. The method of claim 1 , wherein a thickness of the buffer sacrificial layer is about 50 nm and about 200 nm.
9. The method of claim 1 , wherein a thickness of each of the sacrificial layers is about 4 nm and about 10 nm.
10. The method of claim 1 , wherein a thickness of each of the semiconductor layers is about 4 nm and about 10 nm.
11. The method of claim 1 further comprising:
forming an inter layer dielectric (ILD) above the source/drain and above the first gate, wherein forming the ILD completely fills a region between the source/drain and the insulating layer; and
forming source/drain contacts and a gate contact through the ILD.
12. The method of claim 1 further comprising:
forming an inter layer dielectric (ILD) above the source/drain and above the first gate, wherein forming the ILD partially fills a region between the source/drain and the insulating layer; and
forming source/drain contacts and a gate contact through the ILD.
13. The method of claim 1 further comprising:
forming an inter layer dielectric (ILD) above the source/drain and above the first gate, wherein forming the ILD completely fills a region between the source/drain and the insulating layer; and
forming source/drain contacts and a gate contact through the ILD.
14. The method of claim 1 further comprising:
forming an inter layer dielectric (ILD) above the source/drain and above the first gate, wherein there is no ILD in a region between the source/drain and the insulating layer; and
forming source/drain contacts and a gate contact through the ILD.
15. The method of claim 1 , wherein the sacrificial layers and the sacrificial buffer layer comprise silicon germanium.