Composite and transistor
View Patent ↗A novel material is provided. A composite oxide semiconductor in which a first region and a plurality of second regions are mixed is provided. Note that the first region contains at least indium, an element M (the element M is one or more of Al, Ga, Y, and Sn), and zinc, and the plurality of second regions contain indium and zinc. Since the plurality of second regions have a higher concentration of indium than the first region, the plurality of second regions have a higher conductivity than the first region. An end portion of one of the plurality of second regions overlaps with an end portion of another one of the plurality of second regions. The plurality of second regions are three-dimensionally surrounded with the first region.
1. A composite oxide semiconductor comprising a first region and a plurality of second regions,
wherein the first region comprises indium (In), an element M, and zinc (Zn),
wherein the element M is one or more of aluminum, gallium, yttrium, and tin,
wherein the plurality of second regions comprise indium and zinc,
wherein the plurality of second regions have a higher concentration of indium than the first region,
wherein an end portion of one of the plurality of second regions overlaps with an end portion of another one of the plurality of second regions, and
wherein the plurality of second regions are surrounded with the first region.
2. The composite oxide semiconductor according to claim 1 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) is 5:1:6 or a neighborhood thereof.
3. The composite oxide semiconductor according to claim 1 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) in the first region is 4:2:3 or a neighborhood thereof.
4. The composite oxide semiconductor according to claim 1 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) in the plurality of second regions is 2:0:3 or a neighborhood thereof.
5. The composite oxide semiconductor according to claim 1 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) is 4:2:3 or a neighborhood thereof.
6. The composite oxide semiconductor according to claim 1 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) in the first region is 1:1:1 or a neighborhood thereof.
7. The composite oxide semiconductor according to claim 1 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) in the plurality of second regions is 2:0:1 or a neighborhood thereof.
8. The composite oxide semiconductor according to claim 1 , wherein a thickness of each of the plurality of second regions in a c-axis direction is more than or equal to 0.1 nm and less than 1 nm.
9. The composite oxide semiconductor according to claim 1 , wherein the first region is non-single-crystal.
10. The composite oxide semiconductor according to claim 1 , wherein the first region comprises a crystal portion and comprises a portion where a c-axis of the crystal portion is parallel to a normal vector to a surface on which a film of the composite oxide semiconductor is formed.
11. The composite oxide semiconductor according to claim 1 , wherein the plurality of second regions are non-single-crystal.
12. A transistor comprising the composite oxide semiconductor according to claim 1 .
13. The composite oxide semiconductor according to claim 1 , wherein the first region and the plurality of second regions are mixed.
14. The composite oxide semiconductor according to claim 1 , wherein the plurality of second regions have a higher conductivity than the first region.
15. A composite oxide semiconductor comprising a first region and a plurality of second regions,
wherein the first region comprises indium (In), an element M, and zinc (Zn),
wherein the element M is one or more of aluminum, gallium, yttrium, and tin,
wherein the plurality of second regions comprise indium and zinc,
wherein the plurality of second regions have a higher concentration of indium than the first region,
wherein an end portion of one of the plurality of second regions overlaps with an end portion of another one of the plurality of second regions,
wherein the plurality of second regions are surrounded with the first region,
wherein the plurality of second regions have a higher conductivity than the first region, and
wherein the plurality of second regions are non-single-crystal.
16. The composite oxide semiconductor according to claim 15 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) is 5:1:6 or a neighborhood thereof.
17. The composite oxide semiconductor according to claim 15 , wherein an atomic ratio of indium to the element M and zinc (In:M:Zn) in the first region is 4:2:3 or a neighborhood thereof.
18. A semiconductor device comprising:
a first oxide; and
a second oxide over the first oxide,
wherein the first oxide comprises indium, gallium, and zinc, and
wherein the second oxide comprises the composite oxide semiconductor according to claim 15 .