IP Library › Granted Patent US 10,153,306
Granted Patent B2
US 10,153,306 · App. 15/444,153 · Granted Dec 11, 2018

Transistor layout with low aspect ratio

Inventors: Tzung-Yin Lee (Costa Mesa, CA); Aniruddha B. Joshi (Irvine, CA); David Scott Whitefield (Andover, MA); Maureen Rosenberg Brongo (Ladera Ranch, CA)
Assignee: Skyworks Solutions, Inc.
H01L27/124H01L21/84H01L23/66H01L27/1203H01L27/1222H01L27/1255H01L27/1259H01L29/0696H01L29/1087H01L29/41733H01L29/4238H01L29/78615H01L29/78618H01L2223/6666H01L2224/05554H01L2224/48091H01L2224/48227H01L2224/49171H01L2924/181
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Quick Facts
Patent No.
US 10,153,306
App. No.
15/444,153
Granted
Dec 11, 2018
Kind
B2
Abstract

A radio-frequency (RF) device includes a semiconductor substrate, a first field-effect transistor (FET) disposed on the substrate, the first FET having a first plurality of drain fingers, and a second FET connected in series with the first FET along a first dimension, the second FET having a second plurality of drain fingers that extent in a second dimension that is orthogonal with respect to the first dimension.

Claims (28)

1. A radio-frequency device comprising:

a semiconductor substrate;

a first field-effect transistor disposed on the semiconductor substrate, the first field-effect transistor having a first plurality of drain fingers that extend in a first dimension; and

a second field-effect transistor connected in series with the first field-effect transistor along the first dimension, the second field-effect transistor having a second plurality of drain fingers that extend in a second dimension that is orthogonal with respect to the first dimension.

2. The radio-frequency device of claim 1 wherein the second plurality of drain fingers consists of a different number of fingers than the first plurality of drain fingers.

3. The radio-frequency device of claim 2 wherein the first field-effect transistor has a length in the second dimension that is substantially equal to a length of the second field-effect transistor in the second dimension.

4. The radio-frequency device of claim 3 wherein the length of the first field-effect transistor and the length of the second field-effect transistor are both less than 15 μm.

5. The radio-frequency device of claim 1 further comprising one or more drain contact bars extending over the second plurality of drain fingers in the first dimension and contacting one or more of the second plurality of drain fingers.

6. The radio-frequency device of claim 1 further comprising a plurality of drain contact bars extending over the second plurality of drain fingers in the first dimension and a plurality of source contact bars extending over source fingers of the second field-effect transistor, the plurality of drain contact bars and the plurality of source contact bars having a mirrored configuration with respect to the second dimension.

7. The radio-frequency device of claim 1 further comprising a break running across the second plurality of drain fingers in the first dimension, the break providing a body contact for the second field-effect transistor.

8. A method for fabricating a radio-frequency device, the method comprising:

providing a semiconductor substrate;

forming a first field-effect transistor over the semiconductor substrate, the first field-effect transistor having a first plurality of drain fingers that extend in a first direction; and

forming a second field-effect transistor connected in series with the first field-effect transistor along the first direction, the second field-effect transistor having a second plurality of drain fingers that extend in a second direction that is different than the first direction.

9. The method of claim 8 wherein the second plurality of drain fingers includes more fingers than the first plurality of drain fingers.

10. The method of claim 9 wherein the first field-effect transistor has a length in the second direction that is substantially equal to a length of the second field-effect transistor in the second direction.

11. The method of claim 10 wherein the length of the first field-effect transistor and the length of the second field-effect transistor are both less than 15 μm.

12. The method of claim 8 further comprising forming one or more drain contact bars extending over the second plurality of drain fingers in the first direction and contacting one or more of the second plurality of drain fingers.

13. The method of claim 8 further comprising forming a plurality of drain contact bars extending over the second plurality of drain fingers in the first direction and a plurality of source contact bars extending over source fingers of the second field-effect transistor, the plurality of drain contact bars and the plurality of source contact bars having a mirrored configuration with respect to the second direction.

14. The method of claim 8 further comprising forming a break running across the second plurality of drain fingers in the first direction, the break providing a body contact for the second field-effect transistor.

15. A radio-frequency module comprising:

a packaging substrate configured to receive a plurality of components; and

a transistor stack implemented on the packaging substrate, the transistor stack including a first field-effect transistor disposed on the packaging substrate, the first field-effect transistor having a first plurality of drain fingers that extend in a first dimension, the transistor stack further including a second field-effect transistor in a series connection with the first field-effect transistor along the first dimension, the second field-effect transistor having a second plurality of drain fingers that extend in a second dimension that is orthogonal with respect to the first dimension.

16. The radio-frequency module of claim 15 wherein the second plurality of drain fingers includes a different number of fingers than the first plurality of drain fingers.

17. The radio-frequency module of claim 16 wherein the first field-effect transistor has a length in the second dimension that is substantially equal to a length of the second field-effect transistor in the second dimension.

18. The radio-frequency module of claim 17 wherein the length of the first field-effect transistor and the length of the second field-effect transistor are both less than 15 μm.

19. The radio-frequency module of claim 15 further comprising one or more drain contact bars extending over the second plurality of drain fingers in the first dimension and contacting one or more of the second plurality of drain fingers.

20. The radio-frequency module of claim 15 further comprising a plurality of drain contact bars extending over the second plurality of drain fingers in the first dimension and a plurality of source contact bars extending over source fingers of the second field-effect transistor, the plurality of drain contact bars and the plurality of source contact bars having a mirrored configuration with respect to the second dimension.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 14, 2017
From: LEE, TZUNG-YIN; JOSHI, ANIRUDDHA B.; WHITEFIELD, DAVID SCOTT; BRONGO, MAUREEN ROSENBERG
To: SKYWORKS SOLUTIONS, INC.
Reel/Frame 043280/0530 →
Continuity (2)
Provisional Application 62301047 · Feb 29, 2016
Related Publication 20170250200A1 · Aug 31, 2017
Cited By (3)
US 12,205,851 US 12,224,282 US 12,666,714