IP Library › Granted Patent US 12,666,714
Granted Patent B2
US 12,666,714 · App. 18/771,783 · Granted Jun 23, 2026

Methods related to radio-frequency switching devices having improved voltage handling capability

Inventors: Guillaume Alexandre Blin (Carlisle, MA); Aniruddha B. Joshi (Irvine, CA); Christophe Masse (Andover, MA)
Assignee: Skyworks Solutions, Inc.
H10D86/01H03K17/08104H10D30/6729H10D86/201H10W44/20H10W70/63H10D84/0142H10D84/038H10D84/85H10W72/551H10W72/59H10W72/932H10W72/9445H10W74/00H10W74/114H10W90/754
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Quick Facts
Patent No.
US 12,666,714
App. No.
18/771,783
Filed
Jul 12, 2024
Granted
Jun 23, 2026
Kind
B2
Art Unit
2813
USPC
257/347
Abstract

Methods related to radio-frequency (RF) switching devices having improved voltage handling capability. In some embodiments, a method for fabricating an RF switching device can include: providing a semiconductor substrate; forming a plurality of field-effect transistors (FETs) on the semiconductor substrate such that the FETs have a non-uniform distribution of a parameter; and connecting the FETs to form a stack, such that the non-uniform distribution results in the stack having a first voltage handling capacity that is greater than a second voltage handling capacity corresponding to a similar stack having a substantially uniform distribution of the parameter.

Claims (23)

1 . A method for implementing a radio-frequency switching device, the method comprising:

determining an electrical parameter of a first plurality of field-effect transistors for forming a first stack, the first plurality of field-effect transistors having a uniform distribution of a physical parameter of the first plurality of field-effect transistors across the first stack, the electrical parameter of the first plurality of field-effect transistors having a non-uniform distribution across the first stack corresponding to the uniform distribution of the physical parameter across the first stack;

determining a non-uniform distribution of the physical parameter for a second plurality of field-effect transistors for forming a second stack, the non-uniform distribution of the physical parameter of the second stack based on the non-uniform distribution of the electrical parameter of the first plurality of field-effect transistors across the first stack;

providing a semiconductor substrate;

forming the second plurality of field-effect transistors on the semiconductor substrate such that the second plurality of field-effect transistors has the non-uniform distribution of the physical parameter; and

connecting the second plurality of field-effect transistors to form the second stack such that the non-uniform distribution of the physical parameter across the second stack results in the second stack having a second voltage handling capacity that is greater than a first voltage handling capacity corresponding to the first stack having the uniform distribution of the physical parameter of the first plurality of field-effect transistors across the first stack.

2 . The method of claim 1 wherein the second stack further has a second ON-resistance (Ron) value that is less than a first Ron value corresponding to the first stack having the uniform distribution of the physical parameter.

3 . The method of claim 1 wherein the second stack further has a second linearity performance that is better than a first linearity performance corresponding to the first stack having the uniform distribution of the physical parameter.

4 . The method of claim 1 wherein each of the second plurality of field-effect transistors has a source, a drain, and a gate formed on an active region.

5 . The method of claim 4 wherein a field-effect transistor is implemented as a silicon-on-insulator (SOI) device.

6 . The method of claim 4 wherein the physical parameter includes a gate length.

7 . The method of claim 6 wherein a field-effect transistor is implemented as a finger configuration device such that the gate includes a number of rectangular shaped gate fingers, each gate finger implemented between a rectangular shaped source finger of a source contact and a rectangular shaped drain finger of a drain contact.

8 . The method of claim 6 wherein the non-uniform distribution of the gate length is based on a non-uniform distribution of an electrical parameter associated with the first plurality of field-effect transistors.

9 . The method of claim 8 wherein the electrical parameter includes a distribution of voltage VDS across each field-effect transistor.

10 . The method of claim 9 wherein the non-uniform distribution of the gate length tracks a scaled version of the voltage VDS distribution.

11 . The method of claim 10 wherein the scaled version of the voltage VDS distribution is based on scaling of a highest value of a voltage VDS distribution corresponding to the uniform distribution of the gate length.

12 . The method of claim 11 wherein the highest value of the voltage VDS is for a first field-effect transistor from a first terminal of the second stack.

13 . The method of claim 12 wherein the first terminal is configured as an input terminal for receiving a radio-frequency signal.

14 . The method of claim 12 wherein the gate length of at least the first field-effect transistor is greater than a value of the uniform distribution of the gate length.

15 . The method of claim 14 wherein at least some of the second plurality of field-effect transistors have gate lengths that are less than the value of the uniform distribution of the gate length.

16 . The method of claim 12 wherein a sum of VDS values of the second plurality of field-effect transistors for the non-uniform distribution of the gate length is greater than a sum of VDS values of the first plurality of field-effect transistors for the uniform distribution of the gate length.

17 . The method of claim 16 wherein a sum of gate lengths of the second plurality of field-effect transistors for the non-uniform distribution of the gate length is greater than a sum of the gate length of the first plurality of field-effect transistors for the uniform distribution of the gate length.

18 . The method of claim 8 wherein the non-uniform distribution of the gate length includes a plurality of groups of gate length values, each group having a common value of the gate length.

Continuity (6)
Continuation 17353394 · Jun 21, 2021
Continuation 14534146 · Nov 5, 2014
Provisional Application 61902809 · Nov 12, 2013
Provisional Application 61902808 · Nov 12, 2013
Provisional Application 61902810 · Nov 12, 2013
Related Publication 20250056880A1 · Feb 13, 2025
References Cited (138)
US 4962341A · Schoeff · 1990 [cited by examiner]
US 5821827A · Mohwinkel · 1998 [cited by examiner]
US 6049080A · Ito · 2000 [cited by applicant]
US 6501136B1 · Lin · 2002 [cited by examiner]
US 6642578B1 · Arnold · 2003 [cited by examiner]
US 6750517B1 · Ker · 2004 [cited by examiner]
US 6815740B2 · Nelson · 2004 [cited by examiner]
US 6839887B1 · Lampaer · 2005 [cited by examiner]
US 6909189B2 · Nanjo · 2005 [cited by examiner]
US 6917084B2 · Baum · 2005 [cited by examiner]
US 7332386B2 · Lee · 2008 [cited by examiner]
US 7772070B2 · Kitajima · 2010 [cited by examiner]
US 7934173B2 · Shyu · 2011 [cited by examiner]
US 8022745B1 · Dening · 2011 [cited by examiner]
US 8350330B2 · Lu · 2013 [cited by examiner]
US 8401496B2 · Goto · 2013 [cited by examiner]
US 8418120B2 · Lu · 2013 [cited by examiner]
US 8432016B1 · Kerr · 2013 [cited by examiner]
US 8546851B2 · Furuta · 2013 [cited by examiner]
US 8604553B2 · Shinkawata · 2013 [cited by examiner]
US 8716786B2 · Baumgartner · 2014 [cited by examiner]
US 8732638B1 · Fa · 2014 [cited by examiner]
US 8816388B2 · Takada · 2014 [cited by applicant]
US 8896034B1 · Vorhaus · 2014 [cited by examiner]
US 8987792B2 · Adamski · 2015 [cited by examiner]
US 9006860B2 · Chuang · 2015 [cited by examiner]
US 9064864B1 · Stessin · 2015 [cited by examiner]
US 9087173B2 · Tsai · 2015 [cited by examiner]
US 9136263B2 · Koyama · 2015 [cited by examiner]
US 9349655B2 · Diaz · 2016 [cited by examiner]
US 9467130B2 · Liu · 2016 [cited by examiner]
US 9594862B2 · Lin · 2017 [cited by examiner]
US 9620424B2 · Blin · 2017 [cited by examiner]
US 9721936B2 · Zhu · 2017 [cited by examiner]
US 9806094B2 · Whitefield · 2017 [cited by examiner]
US 9837324B2 · Blin · 2017 [cited by examiner]
US 10026656B2 · Chuang · 2018 [cited by examiner]
US 10153306B2 · Lee · 2018 [cited by examiner]
US 10229902B2 · Zhu · 2019 [cited by examiner]
US 10580705B2 · Blin et al. · 2020 [cited by applicant]
US 10700063B2 · Blin · 2020 [cited by examiner]
US 11043432B2 · Blin · 2021 [cited by examiner]
US 11061317B2 · Lin · 2021 [cited by examiner]
US 11133272B1 · Kolev · 2021 [cited by examiner]
US 11854607B2 · Zhao et al. · 2023 [cited by applicant]
US 20020030226A1 · Yasuhara · 2002 [cited by examiner]
US 20020040985A1 · Aldrich · 2002 [cited by examiner]
US 20020088971A1 · Tezuka · 2002 [cited by examiner]
US 20030085428A1 · Nelson · 2003 [cited by examiner]
US 20040110331A1 · Yeo · 2004 [cited by examiner]
US 20040238897A1 · Oishi · 2004 [cited by examiner]
US 20050009312A1 · Butt · 2005 [cited by examiner]
US 20050014473A1 · Zhao · 2005 [cited by examiner]
US 20050051853A1 · Baum · 2005 [cited by examiner]
US 20050073366A1 · Jung · 2005 [cited by examiner]
US 20050079721A1 · Buerger, Jr. · 2005 [cited by examiner]
US 20050082620A1 · Cheng · 2005 [cited by examiner]
US 20050151159A1 · Ma · 2005 [cited by examiner]
US 20050216873A1 · Singh · 2005 [cited by examiner]
US 20050270083A1 · Nakatsuka · 2005 [cited by examiner]
US 20060005624A1 · Hirano · 2006 [cited by applicant]
US 20060107246A1 · Nakamura · 2006 [cited by examiner]
US 20070120153A1 · Williams · 2007 [cited by examiner]
US 20070215952A1 · Ozawa · 2007 [cited by examiner]
US 20080149925A1 · Dusa · 2008 [cited by examiner]
US 20080150022A1 · Pryor · 2008 [cited by examiner]
US 20080157222A1 · Wang · 2008 [cited by examiner]
US 20080157226A1 · Majcherczak · 2008 [cited by examiner]
US 20080174357A1 · Matsuda · 2008 [cited by examiner]
US 20080230807A1 · Kuroda · 2008 [cited by examiner]
US 20090072346A1 · Tomita · 2009 [cited by examiner]
US 20090209074A1 · Anderson · 2009 [cited by examiner]
US 20090278569A1 · Taoka · 2009 [cited by examiner]
US 20090309162A1 · Baumgartner · 2009 [cited by examiner]
US 20100096667A1 · Nakajima · 2010 [cited by examiner]
US 20110001542A1 · Ranta · 2011 [cited by examiner]
US 20110002080A1 · Ranta · 2011 [cited by examiner]
US 20110029266A1 · Lee · 2011 [cited by examiner]
US 20110121362A1 · Braithwaite et al. · 2011 [cited by applicant]
US 20110294445A1 · Goto · 2011 [cited by examiner]
US 20120012945A1 · Inoue · 2012 [cited by examiner]
US 20120112832A1 · Kawano · 2012 [cited by examiner]
US 20120169423A1 · Kamiyama · 2012 [cited by examiner]
US 20120197593A1 · Guo · 2012 [cited by examiner]
US 20120273747A1 · Saitoh · 2012 [cited by examiner]
US 20120280280A1 · Zhang · 2012 [cited by examiner]
US 20120280713A1 · Katoh · 2012 [cited by examiner]
US 20130040434A1 · Tomita · 2013 [cited by examiner]
US 20130061196A1 · Cheng · 2013 [cited by examiner]
US 20130072134A1 · Goto · 2013 [cited by examiner]
US 20130115895A1 · Crandall · 2013 [cited by examiner]
US 20130134018A1 · Aimi · 2013 [cited by examiner]
US 20130134372A1 · Sakuma · 2013 [cited by examiner]
US 20130193512A1 · Weis · 2013 [cited by examiner]
US 20130334610A1 · Moroz · 2013 [cited by examiner]
US 20140103434A1 · Lu · 2014 [cited by examiner]
US 20140124867A1 · Kaibara · 2014 [cited by examiner]
US 20140131792A1 · Siemieniec · 2014 [cited by examiner]
US 20140264625A1 · Adamski · 2014 [cited by examiner]
US 20140346601A1 · Sugiura · 2014 [cited by examiner]
US 20150041917A1 · Zhu · 2015 [cited by examiner]
US 20150115354A1 · Kaindl · 2015 [cited by examiner]
US 20150129965A1 · Roy · 2015 [cited by examiner]
US 20150137260A1 · Matsui · 2015 [cited by examiner]
US 20150140478A1 · Chen · 2015 [cited by examiner]
US 20150171108A1 · Blin · 2015 [cited by examiner]
US 20150171109A1 · Blin · 2015 [cited by examiner]
US 20150171898A1 · Blin · 2015 [cited by examiner]
US 20150279781A1 · Kaibara · 2015 [cited by examiner]
US 20160020173A1 · Wan · 2016 [cited by examiner]
US 20170053938A1 · Whitefield · 2017 [cited by examiner]
US 20170125533A1 · Kotani · 2017 [cited by examiner]
US 20170250200A1 · Lee · 2017 [cited by examiner]
US 20170263495A1 · Augendre · 2017 [cited by examiner]
US 20170346482A1 · Cebi · 2017 [cited by examiner]
US 20180047715A1 · Zhu · 2018 [cited by examiner]
US 20180144993A1 · Blin · 2018 [cited by examiner]
US 20190206863A1 · Blin · 2019 [cited by examiner]
US 20210357565A1 · Fang et al. · 2021 [cited by applicant]
US 20220013414A1 · Blin · 2022 [cited by examiner]
US 20220321119A1 · Lam · 2022 [cited by applicant]
US 20230260907A1 · Gupta · 2023 [cited by examiner]
US 20250151392A1 · Blin · 2025 [cited by examiner]
CN 1528056A · 2004 [cited by applicant]
CN 1870433A · 2006 [cited by applicant]
CN 101102103A · 2008 [cited by applicant]
CN 102185594A · 2011 [cited by applicant]
CN 102270982A · 2011 [cited by applicant]
EP 0766396A2 · 1997 [cited by applicant]
Baedi et al., The Effect of Gate Length on SOI-MOSFETs Operation, Advances in Applied Science Research, 2010, 1(1): pp. 14-18. [cited by applicant]
V. Srivastava et al., Effect of Gate Finger on Double-Gate MOSFET for RF Switch at 45-nm Technology, 2011 International Conference on Communication Systems and Network Technologies, 2011, IEEE Computer Society, 2011 Int… [cited by applicant]
CN 201410858446.8, Devices and Methods Related to Radio-Frequency Switches Having Improved Performance, Nov. 12, 2014. [cited by applicant]
CN 201911254831.0, Devices and Methods Related to Radio-Frequency Switches Having Improved Performance, Dec. 9, 2019. [cited by applicant]
EP 14192353.2, Devices and Methods Related to Radio-Frequency Switches Having Improved Performance, Nov. 7, 2014. [cited by applicant]
EP 19150840.7, Devices and Methods Related to Radio-Frequency Switches Having Improved Performance, Jan. 8, 2019. [cited by applicant]
U.S. Appl. No. 14/534,148, Devices and Methods Related to Radio-Frequency Switches Having Improved On-Resistance Performance, Nov. 5, 2014. [cited by applicant]
U.S. Appl. No. 15/832,711, Devices and Methods Related to Radio-Frequency Switches Having Improved On-Resistance Performance, Dec. 5, 2017. [cited by applicant]
U.S. Appl. No. 14/534,149, Improved Linearity Performance for Radio-Frequency Switches, Nov. 5, 2014. [cited by applicant]