Angular velocity detector
An angular velocity detector includes an angular velocity detecting element having a vibrating body arranged in a base substrate to be vibrated on a surface horizontal with respect to the base substrate. The angular velocity detecting element detects an angular velocity around an axis perpendicular to the base substrate based on a vibration of the vibrating body. In the angular velocity detector, a circuit substrate is bonded to a first surface of the base substrate through an adhesive, and a second surface of the angular velocity detecting element is electrically connected to the circuit substrate through a bonding wire. Furthermore, the adhesive is partially arranged on the first surface of the base substrate at least at a portion corresponding to a bonding portion of the bonding wire on the second surface of the base substrate. Therefore, a wire bonding can be easily accurately performed.
1. An angular velocity detector comprising:
an angular velocity detecting element including a base substrate having a rectangular shape, and a vibrating body arranged in the base substrate to be vibrated on a surface horizontal with respect to the base substrate, wherein the angular velocity detecting element detects an angular velocity around an axis perpendicular to the base substrate based on a vibration of the vibrating body;
a circuit substrate laminated with the angular velocity detecting element to be bonded to a first surface of the base substrate of the angular velocity detecting element through an adhesive; and
a bonding wire through which a second surface of the base substrate of the angular velocity detecting element, opposite to the first surface, is electrically connected to the circuit substrate,
wherein the adhesive is partially arranged on four corner areas of the first surface of the base substrate corresponding to a bonding portion of the bonding wire on the second surface of the base substrate.
2. The angular velocity detector according to claim 1 , wherein:
the angular velocity detecting element is arranged above the circuit substrate; and
the adhesive is partially provided on the first surface of the base substrate below the bonding portion of the bonding wire in the base substrate.
3. The angular velocity detector according to claim 1 , wherein:
a plurality of the bonding wires are arranged at different bonding portions in the base substrate; and
the adhesive is partially arranged on the first surface of the base substrate at least at portions corresponding to the bonding portions of the bonding wires in the base substrate.
4. The angular velocity detector according to claim 1 , further comprising
a package for accommodating the angular velocity detecting element and the circuit substrate,
wherein the circuit substrate is mounted on the package to be fixed to the package.
5. The angular velocity detector according to claim 1 , wherein:
the adhesive has a constricted shape.
6. The angular velocity detector according to claim 1 , wherein:
the adhesive is made of two film members bonded to each other.
7. The angular velocity detector according to claim 1 , wherein:
the adhesive has a trapezoidal shape.
8. The angular velocity detector according to claim 1 , wherein:
a sectional shape of the adhesive has a trapezoidal shape in which a side on the angular velocity detecting element is short.
9. An angular velocity detector comprising:
an angular velocity detecting element including a base substrate having a rectangular shape, and a vibrating body arranged in the base substrate to be vibrated on a surface horizontal with respect to the base substrate, wherein the angular velocity detecting element detects an angular velocity around an axis perpendicular to the base substrate based on a vibration of the vibrating body;
a circuit substrate laminated with the angular velocity detecting element to be bonded to a first surface of the base substrate of the angular velocity detecting element through an adhesive; and
a bonding wire through which a second surface of the base substrate of the angular velocity detecting element, opposite to the first surface, is electrically connected to the circuit substrate, wherein:
the adhesive is partially arranged on four corner areas of the first surface of the base substrate in an arrangement area; and
the bonding wire is connected to the angular velocity detecting element at a position within a projecting area on the second surface of the arrangement area.
10. The angular velocity detector according to claim 9 , wherein:
the angular velocity detecting element is arranged above the circuit substrate; and
the projecting area is a vertically projected portion of the arrangement area relative to the second surface.
11. The angular velocity detector according to claim 9 , wherein:
a plurality of the bonding wires are arranged at different bonding portions in the base substrate; and
the bonding wires are bonded to the second surface of the angular velocity detecting element at positions within the projecting area.
12. The angular velocity detector according to claim 9 , wherein:
the adhesive has a constricted shape.
13. The angular velocity detector according to claim 9 , wherein:
the adhesive is made of two film members bonded to each other.
14. The angular velocity detector according to claim 9 , wherein:
the adhesive has a trapezoidal shape.
15. The angular velocity detector according to claim 9 , wherein:
a sectional shape of the adhesive has a trapezoidal shape in which a side on the angular velocity detecting element is short.
16. An angular velocity detector comprising:
an angular velocity detecting element including a base substrate, and a vibrating body arranged in the base substrate to be vibrated on a surface horizontal with respect to the base substrate, wherein the angular velocity detecting element detects an angular velocity around an axis perpendicular to the base substrate based on a vibration of the vibrating body;
a circuit substrate laminated with the angular velocity detecting element to be bonded to a bottom surface of the base substrate of the angular velocity detecting element through an adhesive; and
a bonding wire through which an upper surface of the base substrate of the angular velocity detecting element is electrically connected to the circuit substrate,
wherein the adhesive is partially arranged on a peripheral portion of the bottom surface of the base substrate symmetrically, to support the angular velocity detecting element, the adhesive having a constricted shape constricted at a center portion in its thickness direction.
17. An angular velocity detector comprising:
an angular velocity detecting element including a base substrate, and a vibrating body arranged in the base substrate to be vibrated on a surface horizontal with respect to the base substrate, wherein the angular velocity detecting element detects an angular velocity around an axis perpendicular to the base substrate based on a vibration of the vibrating body;
a circuit substrate laminated with the angular velocity detecting element to be bonded to a first surface of the base substrate of the angular velocity detecting element through an adhesive; and
a bonding wire through which a second surface of the base substrate of the angular velocity detecting element, opposite to the first surface, is electrically connected to the circuit substrate,
wherein the adhesive is partially arranged on the first surface of the base substrate at least at a portion corresponding to a bonding portion of the bonding wire on the second surface of the base substrate and the adhesive has a constricted shape constricted at a center portion in its thickness direction.