IP Library Granted Patent US 10,141,511
Granted Patent B2
US 10,141,511 · App. 15/447,504 · Granted Nov 27, 2018

Deposition mask, apparatus for manufacturing display apparatus, and method of manufacturing display apparatus

Inventor: Sanghoon Kim (Yongin-si, KR)
Assignee: Samsung Display Co., Ltd.
H01L51/0011C23C14/042H01L27/3244C23C14/04C23C14/044H01L51/0014H01L51/56H01L2227/323
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,141,511
App. No.
15/447,504
Granted
Nov 27, 2018
Kind
B2
Abstract

A deposition mask extending in a first direction may include: a pattern portion including a plurality of pattern holes; and a clamping portion including a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion, wherein the pattern portion may include a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

Claims (25)

1. A deposition mask extending in a first direction, the deposition mask comprising:

a pattern portion comprising a plurality of pattern holes; and

a clamping portion comprising a protrusion portion to be attached to a clamp and an indentation portion formed in a direction toward the pattern portion,

wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

2. The deposition mask of claim 1 , wherein the plurality of pattern holes are disposed corresponding to target deposition areas.

3. The deposition mask of claim 1 , wherein a number of the plurality of pattern holes that overlap the protrusion portion in the first direction is less than a number of the plurality of pattern holes that overlap the indentation portion in the first direction.

4. The deposition mask of claim 1 , wherein a number of the plurality of pattern holes arranged in the first direction is gradually reduced in a direction from the indentation portion toward the protrusion portion in the second direction.

5. The deposition mask of claim 1 , wherein the blocking portion has an area gradually decreasing in a direction from the clamping portion toward the pattern portion in the first direction.

6. The deposition mask of claim 1 , wherein the blocking portion has a multistep shape in the first direction and the second direction.

7. An apparatus for manufacturing a display apparatus, the apparatus comprising:

a mask frame assembly disposed facing a substrate; and

a deposition source disposed facing the mask frame assembly,

wherein the mask frame assembly comprises:

a frame comprising an opening at a center portion thereof;

a deposition mask disposed on the frame facing the substrate, the deposition mask being installed on the frame while being extended in a first direction by a clamp attached to both ends of the deposition mask; and

a support stick extending in a second direction crossing the first direction, covering a part of the deposition mask and supporting the deposition mask,

wherein the deposition mask comprises:

a pattern portion comprising a plurality of pattern holes; and

a clamping portion comprising a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion,

wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.

8. The apparatus of claim 7 , wherein the plurality of pattern holes are disposed corresponding to target deposition areas.

9. The apparatus of claim 7 , wherein a number of the plurality of pattern holes that overlap the protrusion portion in the first direction is less than a number of the plurality of pattern holes that overlap the indentation portion in the first direction.

10. The apparatus of claim 7 , wherein a number of the plurality of pattern holes arranged in the first direction is gradually reduced in a direction from the indentation portion toward the protrusion portion in the second direction.

11. The apparatus of claim 7 , wherein the blocking portion has an area gradually decreasing in a direction from the clamping portion toward the pattern portion in the first direction.

12. The apparatus of claim 7 , wherein the blocking portion has a multistep shape in the first direction and the second direction.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 2, 2017
From: KIM, SANGHOON
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 041438/0924 →
Priority Claims (1)
KR 10-2016-0028296 · Mar 9, 2016 · national
Continuity (1)
Related Publication 20170263867A1 · Sep 14, 2017
Cited By (2)
US 12,406,870 US 12,410,508