Deposition mask stage, display manufacturing apparatus including the same, and display manufacturing method using the same
Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.
1. A deposition mask stage, comprising:
a stage frame;
chucks combined with the stage frame; and
support blocks on a back side of the stage frame, wherein
the chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame, the first and second directions intersecting each other, and
the support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.
2. The deposition mask stage of claim 1 , wherein each of the chucks includes a permanent magnetic chuck.
3. The deposition mask stage of claim 1 , further comprising:
a position adjustment device combined with each of the support blocks, the position adjustment device adjusting a position of each of the support blocks.
4. The deposition mask stage of claim 1 , wherein each of the chucks is spaced apart from each of the support blocks.
5. The deposition mask stage of claim 1 , wherein each of the chucks is disposed on the back side of the stage frame.
6. The deposition mask stage of claim 5 , wherein a distance between a back side of each of the support blocks and the back side of the stage frame is greater than a distance between a back side of each of the chucks and the back side of the stage frame.
7. A display manufacturing apparatus, comprising:
a deposition source; and
a deposition mask stage spaced apart from the deposition source,
wherein the deposition mask stage includes:
a stage frame; and
at least one chuck physically connected to the stage frame.
8. The display manufacturing apparatus of claim 7 , wherein the at least one chuck is disposed opposite to the deposition source with the stage frame between the at least one chuck and the deposition source.
9. The display manufacturing apparatus of claim 7 , wherein the deposition mask stage is spaced in a horizontal direction from the deposition source.
10. The display manufacturing apparatus of claim 9 , wherein
the at least one chuck comprises a plurality of chucks, and
the plurality of chucks are spaced apart from each other in direction that intersects the horizontal direction.
11. The display manufacturing apparatus of claim 7 , wherein
the deposition mask stage further includes a support block physically connected to the stage frame,
the stage frame has a front side directed toward the deposition source and a back side opposite to the front side, and
the support block is disposed on the back side of the stage frame.
12. The display manufacturing apparatus of claim 7 , wherein the at least one chuck includes a permanent magnetic chuck.
13. The display manufacturing apparatus of claim 12 , further comprising a chuck power supply that supplies the permanent magnetic chuck with power.
14. A display manufacturing method, the method comprising:
loading a substrate on a display manufacturing apparatus; and
using a deposition source of the display manufacturing apparatus to perform a deposition process on the substrate, wherein
the loading of the substrate on the display manufacturing apparatus includes:
placing the substrate on a deposition mask stage of the display manufacturing apparatus; and
using at least one chuck of the deposition mask stage to fix the substrate to the deposition mask stage, and
the placing of the substrate on the deposition mask stage includes allowing a deposition mask to contact the deposition mask stage such that a front side of the substrate faces toward the deposition source, and the deposition mask is physically connected to the front side of the substrate.
15. The display manufacturing method of claim 14 , wherein
the at least one chuck comprises a plurality of chucks,
wherein the fixing of the substrate to the deposition mask stage includes turning on at least one of the plurality of chucks and turning off remaining ones of the plurality of chucks.
16. The display manufacturing method of claim 15 , further comprising determining whether each of the plurality of chucks is turned off.
17. The display manufacturing method of claim 16 , wherein the determining whether each of the plurality of chucks is turned off includes:
classifying types of the deposition mask; and
determining which of the plurality of chucks is turned off for each type of the deposition mask.
18. The display manufacturing method of claim 14 , wherein
the deposition mask stage includes:
a stage frame; and
a support block on a back side of the stage frame, and
the allowing of the deposition mask to contact the deposition mask stage includes allowing a front side of the deposition mask to contact a back side of the support block.
19. The display manufacturing method of claim 18 , wherein the loading of the substrate on the display manufacturing apparatus includes adjusting a distance between the back side of the support block and the back side of the stage frame.
20. The display manufacturing method of claim 14 , wherein the placing of the substrate on the deposition mask stage includes transferring the substrate into a chamber of the display manufacturing apparatus in a state that a back side of the substrate is fixed to a support plate.