Semiconductor device including contact structure
A semiconductor device including a contact structure is provided. The semiconductor device includes an isolation region defining a lower active region. First and second source/drain regions and first and second gate electrodes are on the lower active region. The first and second source/drain regions are adjacent to each other. First and second gate capping patterns are on the first and second gate electrodes, respectively. First and second contact structures are on the first and second source/drain regions, respectively. A lower insulating pattern is between the first and second source/drain regions. An upper insulating pattern is between the first and second contact structures. Silicon oxide has etching selectivity with respect to an insulating material which the upper insulating pattern, the first gate capping pattern, and the second gate capping pattern are formed of.
1. A semiconductor device, comprising:
a first isolation region defining a lower active region;
a first fin active region and a second fin active region, disposed on the lower active region;
a first gate structure overlapping the first fin active region and a second gate structure overlapping the second fin active region, each of the first gate structure and the second gate structure including gate spacers, as well as a gate electrode and a gate capping pattern, disposed between the gate spacers and stacked in sequence;
a first source/drain region and a second source/drain region, disposed adjacent to each other, the first source/drain region being disposed in a first recess of the first fin active region and the second source/drain region being disposed in a second recess of the second fin active region;
a first contact structure and a second contact structure, disposed on the first source/drain region and the second source/drain region, respectively;
an interlayer insulating pattern disposed on the first isolation region;
a lower insulating pattern disposed in-between the first fin active region and the second fin active region; and
a first upper insulating pattern overlapping the lower insulating pattern and disposed between the first contact structure and the second contact structure and a second upper insulating pattern disposed on the interlayer insulating pattern,
wherein a material of the interlayer insulating pattern has etching selectivity with respect to materials of the first upper insulating pattern, the second upper insulating pattern, and the gate capping pattern.
2. The semiconductor device of claim 1 , further comprising a second isolation region on the lower active region, wherein the first fin active region and the second fin active region penetrate through the second isolation region and protrude above an upper surface of the second isolation region.
3. The semiconductor device of claim 1 , further comprising a middle insulating pattern disposed between the first upper insulating pattern and the lower insulating pattern, wherein the middle insulating pattern has etching selectivity with respect to the lower insulating pattern, the first upper insulating pattern, the second upper insulating pattern, and the gate capping pattern.
4. The semiconductor device of claim 1 , wherein each of the first gate structure and the second gate structure further comprises a gate dielectric material covering a bottom surface of the gate electrode and extending between the gate spacers and the gate electrode.
5. The semiconductor device of claim 4 , further comprising spacer patterns disposed between the first source/drain region and the first upper insulating pattern and between the second source/drain region and the first upper insulating pattern, wherein the spacer patterns are formed of a material the same as a material of the gate spacers, and heights of the spacer patterns are smaller than heights of the gate spacers.
6. The semiconductor device of claim 1 , wherein an upper region of the first contact structure is surrounded by the first gate structure and the first upper insulating pattern.
7. The semiconductor device of claim 1 , wherein the first upper insulating pattern is wider than the lower insulating pattern.
8. The semiconductor device of claim 1 , wherein the first upper insulating pattern comprises a first portion overlapping the lower active region and a second portion extending from the first portion and overlapping the first isolation region, and the second portion is wider than the first portion.
9. The semiconductor device of claim 1 , wherein a width of the lower insulating pattern is gradually reduced in a direction from an upper portion toward a lower portion of the lower insulating pattern.
10. The semiconductor device of claim 1 , wherein an upper surface of the lower insulating pattern has a downwardly concave shape.