Integrated structures, capacitors and methods of forming capacitors
Some embodiments include an integrated structure having a semiconductor base and an insulative frame over the semiconductor base. The insulative frame has vertically-spaced sheets of first insulative material, and pillars of second insulative material between the vertically-spaced sheets. The first and second insulative materials are different from one another. Conductive plates are between the vertically-spaced sheets and are directly against the insulative pillars. Some embodiments include capacitors, and some embodiments include methods of forming capacitors.
1. A capacitor comprising:
a stack of alternating first and second levels supported by a base; the first levels comprising only insulative material, and the second levels comprising insulative pillars extending through conductive material;
a plurality of slots extending through the stack; each of the slots comprised by the plurality of slots having a first end and an opposing second end with a central region between the first and second ends; the plurality of slots being arranged in multiple rows with the second ends of within a first row being spaced from the first ends of slots in a second row by a lateral distance; and
the insulative pillars within the second levels being within the lateral distance between rows of slots, the insulative pillars being of a different composition than the insulative material of the first levels.
2. The capacitor of claim 1 wherein the insulative pillars comprise silicon nitride; and wherein the insulative material of the first levels comprises silicon dioxide.
3. The capacitor of claim 1 wherein the slots extend along a first direction, and wherein the insulative pillars form walls extending along a second direction substantially orthogonal to the first direction; the walls subdividing the conductive material within each of the second levels into panels.
4. The capacitor of claim 3 wherein at least some of the panels of one of the second levels are electrically coupled with one another.
5. The capacitor of claim 3 wherein all of the panels of one of the second levels are electrically coupled with one another.
6. The capacitor of claim 3 wherein at least some of the panels of one of the second levels are not electrically coupled with one another.
7. The capacitor of claim 3 wherein none of the panels of one of the second levels are electrically coupled with one another.
8. The capacitor of claim 3 wherein the walls have substantially diamond shaped regions.
9. The capacitor of claim 1 wherein the conductive material of the second levels comprises metal.
10. The capacitor of claim 1 wherein the conductive material of the second levels comprises one or more of tungsten, titanium, tungsten nitride and titanium nitride.
11. The capacitor of claim 1 wherein the conductive material of each of the second levels is a continuous sheet wrapping around the insulative pillars.
12. The capacitor of claim 1 integrated into circuitry on a die together with a three-dimensional NAND memory array.