Semiconductor device and method of forming partition fence and shielding layer around semiconductor components
View Patent ↗A semiconductor device has a partition fence disposed between a first attach area and a second attach area on a substrate. A first electrical component is disposed over the first attach area. A second electrical component is disposed over the second attach area. The partition fence extends above and along a length of the first electrical component and second electrical component. An encapsulant is deposited over the substrate, first electrical component, second electrical component, and partition fence. A portion of the encapsulant is removed to expose a surface of the partition fence and planarizing the encapsulant. A shielding layer is formed over the encapsulant and in contact with the surface of the partition fence. The combination of the partition fence and shielding layer compartmentalize the first electrical component and second electrical component for physical and electrical isolation to reduce the influence of EMI, RFI, and other inter-device interference.
1. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a partition fence between a first attach area and a second attach area on the substrate;
disposing a first electrical component over the first attach area;
disposing a second electrical component over the second attach area with a first encapsulant disposed over the second electrical component;
depositing a second encapsulant over the substrate and around the first electrical component, second electrical component, and partition fence;
planarizing the second encapsulant to expose a top surface of the partition fence and a surface of the first encapsulant; and
forming a shielding layer over the second encapsulant and in contact with the first encapsulant and the top surface of the partition fence.
2. The method of claim 1 , wherein the partition fence extends along a length of the first electrical component and second electrical component.
3. The method of claim 1 , wherein the partition fence extends above the first electrical component and second electrical component.
4. The method of claim 1 , further including forming a conductive layer over the substrate, wherein the partition fence is electrically connected to the conductive layer.
5. The method of claim 1 , wherein the first electrical component or second electrical component includes an integrated passive device.
6. A method of making a semiconductor device, comprising:
providing a substrate;
disposing a first electrical component over the substrate;
disposing a second electrical component over the substrate;
disposing a partition fence between the first electrical component and second electrical component;
depositing an encapsulant over the substrate and around the first electrical component, second electrical component, and partition fence;
planarizing the encapsulant to a level even with a top surface of the partition fence; and
forming a shielding layer over the encapsulant with the shielding layer in direct contact with all portions of the surface of the partition fence.
7. The method of claim 6 , wherein the partition fence extends along a length of the first electrical component and second electrical component.
8. The method of claim 6 , wherein the partition fence extends above the first electrical component and second electrical component.
9. The method of claim 6 , further including forming a conductive layer over the substrate, wherein the partition fence is electrically connected to the conductive layer.
10. The method of claim 6 , wherein the first electrical component or second electrical component includes an integrated passive device.
11. A semiconductor device, comprising:
a substrate;
a partition fence disposed between a first attach area and a second attach area on the substrate;
a first electrical component disposed over the first attach area;
a second electrical component disposed over the second attach area;
an encapsulant deposited over the substrate and around first electrical component, second electrical component, and partition fence and planarized to a level even with a top surface of the partition fence; and
a shielding layer formed over the encapsulant and in direct contact with the top surface of the partition fence.
12. The semiconductor device of claim 11 , wherein the partition fence extends along a length of the first electrical component and second electrical component.
13. The semiconductor device of claim 11 , wherein the partition fence extends above the first electrical component and second electrical component.
14. The semiconductor device of claim 11 , further including a conductive layer formed over the substrate, wherein the partition fence is electrically connected to the conductive layer.
15. The semiconductor device of claim 11 , wherein the first electrical component or second electrical component includes an integrated passive device.
16. The semiconductor device of claim 11 , wherein the first electrical component or second electrical component includes a semiconductor die.
17. A semiconductor device, comprising:
a substrate;
a first electrical component disposed over the substrate;
a second electrical component disposed over the substrate;
a partition fence disposed between the first electrical component and second electrical component;
an encapsulant deposited around the substrate, first electrical component, second electrical component, and partition fence and planarized to a level even with a top surface of the partition fence; and
a shielding layer formed over the encapsulant with the shielding layer in direct contact with the top surface of the partition fence.
18. The semiconductor device of claim 17 , wherein the partition fence extends along a length of the first electrical component and second electrical component.
19. The semiconductor device of claim 17 , wherein the partition fence extends above the first electrical component and second electrical component.
20. The semiconductor device of claim 17 , further including a conductive layer formed over the substrate, wherein the partition fence is electrically connected to the conductive layer.
21. The semiconductor device of claim 17 , wherein the first electrical component or second electrical component includes an integrated passive device.
22. The semiconductor device of claim 17 , wherein the first electrical component or second electrical component includes a semiconductor die.