IP Library Granted Patent US 9,876,109
Granted Patent B2
US 9,876,109 · App. 15/465,936 · Granted Jan 23, 2018

Transistors having strained channel under gate in a recess

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Quick Facts
Patent No.
US 9,876,109
App. No.
15/465,936
Granted
Jan 23, 2018
Kind
B2
Abstract

Some embodiments include a construction having a second semiconductor material over a first semiconductor material. A region of the second semiconductor material proximate the first semiconductor material has strain due to different lattice characteristics of the first and second semiconductor materials. A transistor gate extends downwardly into the second semiconductor material. Gate dielectric material is along sidewalls and a bottom of the transistor gate. Source/drain regions are along the sidewalls of the transistor gate, and the gate dielectric material is between the source/drain regions and the transistor gate. A channel region extends between the source/drain regions and is under the bottom of the transistor gate. At least some of the channel region is within the strained region.

Claims (51)

1. A semiconductor construction, comprising:

a first semiconductor material;

a second semiconductor material over the first semiconductor material and having a strained region proximate the first semiconductor material;

a transistor gate extending downwardly into the second semiconductor material;

conductively-doped source/drain regions proximate sidewalls of the transistor gate and extending downwardly into the second semiconductor material;

a channel region extending between the conductively-doped source/drain regions and under the bottom of the transistor gate, at least some of the channel region being within the strained region;

wherein upper surfaces of the conductively-doped source/drain regions are above an upper surface of the transistor gate; and

wherein the first semiconductor material comprises germanium and the second semiconductor material comprises silicon.

2. The semiconductor construction of claim 1 wherein the source/drain regions are less deep than the transistor gate within the second semiconductor material.

3. The semiconductor construction of claim 1 wherein the channel region is container-shaped; and wherein an interface where the first and second semiconductor materials join is configured to be container-shaped, with the container-shaped channel region being nested within the container-shaped interface.

4. A semiconductor construction, comprising:

a first semiconductor material;

a second semiconductor material over the first semiconductor material and having a strained region proximate the first semiconductor material;

a transistor gate extending downwardly into the second semiconductor material;

conductively-doped source/drain regions proximate sidewalls of the transistor gate and extending downwardly into the second semiconductor material;

a channel region extending between the conductively-doped source/drain regions and under the bottom of the transistor gate, at least some of the channel region being within the strained region;

wherein upper surfaces of the conductively-doped source/drain regions are above an upper surface of the transistor gate; and

wherein the first semiconductor material comprises a mixture of germanium and silicon, and wherein the second semiconductor material comprises silicon.

5. A semiconductor construction, comprising:

a first semiconductor material;

a second semiconductor material over the first semiconductor material and joining the first semiconductor material along an interface; a strained region of the second semiconductor material being proximate the interface;

a transistor gate extending into the second semiconductor material;

an intervening region of the second semiconductor material being between a bottom of the transistor gate and the first semiconductor material; an entirety of the intervening region being encompassed by the strained region;

dielectric material along sidewalls and the bottom of the transistor gate;

source/drain regions proximate the transistor gate, and spaced from the transistor gate by the dielectric material; the source/drain regions extending into the second semiconductor material to a depth less than a depth of the transistor gate within the second semiconductor material;

wherein a channel region extends between the source/drain regions and under the bottom of the transistor gate;

wherein the second semiconductor material comprises silicon; and

wherein the first semiconductor material comprises a mixture of germanium and silicon.

6. The semiconductor construction of claim 5 wherein the channel region is container-shaped; and wherein the interface is also container-shaped, with the container-shaped channel region being nested within the container-shaped interface.

7. The semiconductor construction of claim 5 wherein a thickness of the channel region is substantially consistent along an entirety of the channel region.

8. A semiconductor construction, comprising:

a first semiconductor material;

a second semiconductor material over the first semiconductor material and joining the first semiconductor material along an interface; a strained region of the second semiconductor material being proximate the interface;

a transistor gate extending into the second semiconductor material;

an intervening region of the second semiconductor material being between a bottom of the transistor gate and the first semiconductor material; an entirety of the intervening region being encompassed by the strained region;

dielectric material along sidewalls and the bottom of the transistor gate;

source/drain regions proximate the transistor gate, and spaced from the transistor gate by the dielectric material; the source/drain regions extending into the second semiconductor material to a depth less than a depth of the transistor gate within the second semiconductor material;

wherein a channel region extends between the source/drain regions and under the bottom of the transistor gate;

wherein the second semiconductor material comprises silicon; and

wherein the first semiconductor material comprises a mixture of germanium and carbon.

9. A semiconductor construction, comprising:

a first semiconductor material;

a second semiconductor material over the first semiconductor material and joining the first semiconductor material along an interface; a strained region of the second semiconductor material being proximate the interface;

a transistor gate extending into the second semiconductor material;

an intervening region of the second semiconductor material being between a bottom of the transistor gate and the first semiconductor material; an entirety of the intervening region being encompassed by the strained region;

dielectric material along sidewalls and the bottom of the transistor gate;

source/drain regions proximate the transistor gate, and spaced from the transistor gate by the dielectric material; the source/drain regions extending into the second semiconductor material to a depth less than a depth of the transistor gate within the second semiconductor material;

wherein a channel region extends between the source/drain regions and under the bottom of the transistor gate;

wherein the second semiconductor material comprises silicon; and

wherein the first semiconductor material comprises a II/VI mixture, a IV/VI mixture or a II/V mixture.

10. The semiconductor construction of claim 9 wherein a portion of the channel region is not within the strained region.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050702/0451 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 4 TO PATENT SECURITY AGREEMENT Recorded May 4, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042405/0909 →