Forming gates with varying length using sidewall image transfer
View Patent ↗A chip includes multiple first transistors in a first region and multiple second transistors in a second region. A gap between adjacent first transistors has a same width as a gap between adjacent second transistors. Gates of the second transistors have a length substantially the same as twice a length of two adjacent first transistors plus the distance between said two adjacent first transistors.
1. A chip, comprising:
a plurality of first transistors in a first region; and
a plurality of second transistors in a second region, wherein a gap between adjacent first transistors has a same width as a gap between adjacent second transistors, and wherein gates of the second transistors have a length substantially the same as twice a length of two adjacent first transistors plus the distance between said two adjacent first transistors.
2. The chip of claim 1 , comprising twice as many first transistors as second transistors.
3. The chip of claim 2 , wherein a number of second transistors is a multiple of two.
4. The chip of claim 1 , wherein the plurality of first transistors are fin field effect transistors.
5. The chip of claim 4 , wherein the plurality of second transistors are fin field effect transistors.
6. The chip of claim 1 , wherein the first transistors are digital logic devices and wherein the second transistors are analog devices.
7. The chip of claim 1 , wherein the first and second transistors each comprise respective gates formed on a planar semiconductor substrate.
8. The chip of claim 7 , wherein the first and second transistors further comprise source and drain regions formed within the planar semiconductor substrate.
9. The chip of claim 7 , wherein the respective gates of the first and second transistors are fin structures.
10. A chip, comprising:
a plurality of first digital logic transistors in a first region comprising respective gates formed on respective channel regions; and
a plurality of second analog transistors in a second region comprising respective gates formed on respective channel regions, wherein a gap between adjacent first transistors has a same width as a gap between adjacent second transistors, and wherein gates of the second transistors have a length substantially the same as twice a length of two adjacent first transistors plus the distance between said two adjacent first transistors.
11. The chip of claim 10 , comprising twice as many first transistors as second transistors.
12. The chip of claim 11 , wherein a number of second transistors is a multiple of two.
13. The chip of claim 10 , wherein the plurality of first transistors are fin field effect transistors.
14. The chip of claim 13 , wherein the plurality of second transistors are fin field effect transistors.
15. The chip of claim 10 , wherein the first and second transistors further comprise source and drain regions formed within the planar semiconductor substrate.
16. The chip of claim 10 , wherein the respective gates of the first and second transistors are fin structures.
17. A chip, comprising:
a plurality of first digital logic transistors in a first region comprising respective gate fin structures formed on respective channel regions; and
an even number of second analog transistors in a second region comprising respective gate fin structures formed on respective channel regions, there being half as many second transistors as first transistors, wherein a gap between adjacent first transistors has a same width as a gap between adjacent second transistors, and wherein gates of the second transistors have a length substantially the same as twice a length of two adjacent first transistors plus the distance between said two adjacent first transistors.
18. The chip of claim 17 , wherein the plurality of first transistors are fin field effect transistors.
19. The chip of claim 18 , wherein the plurality of second transistors are fin field effect transistors.
20. The chip of claim 17 , wherein the first and second transistors further comprise source and drain regions formed within the planar semiconductor substrate.