Multiple plate line architecture for multideck memory array
View Patent ↗Methods, systems, and devices for multiple plate line architecture for multideck memory arrays are described. A memory device may include two or more three-dimensional arrays of ferroelectric memory cells overlying a substrate layer that includes various components of support circuitry, such as decoders and sense amplifiers. Each memory cell of the array may have a ferroelectric container and a selector device. Multiple plate lines or other access lines may be routed through the various decks of the device to support access to memory cells within those decks. Plate lines or other access lines may be coupled between support circuitry and memory cells through on pitch via (OPV) structures. OPV structures may include selector devices to provide an additional degree of freedom in multideck selectivity. Various number of plate lines and access lines may be employed to accommodate different configurations and orientations of the ferroelectric containers.
1. An electronic memory device, comprising:
a first array of ferroelectric memory cells configured in a cross point architecture, each ferroelectric memory cell of the first array coupled with a first access line oriented in a first direction and a second access line oriented in a second direction that is substantially orthogonal to the first direction;
a first plate line oriented in the first direction and coupled with ferroelectric memory cells of the first array;
a second array of ferroelectric memory cells configured in the cross point architecture, wherein the first array overlies the second array, each ferroelectric memory cell of the second array coupled with a third access line oriented in the first direction and a fourth access line oriented in the second direction;
a plurality of second plate lines oriented in the first direction, each plate line of the plurality of second plate lines coupled with the first plate line and ferroelectric memory cells of the second array; and
support circuitry coupled with the first array and the second array, wherein:
portions of the first access lines oriented in the first direction overlie portions of the second plate lines;
the first access lines oriented in the first direction in the first array of ferroelectric memory cells are coupled to first electrical connections below the first access lines oriented in the first direction in the first array of ferroelectric memory cells; and
the second plate lines oriented in the first direction are coupled to second electrical connections above the second plate lines.
2. The device of claim 1 , further comprising:
a control circuit portion comprising a plate line decoder coupled with the first plate line through an on pitch via (OPV) and the plurality of second plate lines via the first plate line.
3. The device of claim 1 , wherein the support circuitry comprises:
a first digit line decoder coupled with the first access line oriented in the first direction;
a second digit line decoder coupled with the third access line oriented in the first direction; and
a word line decoder coupled with both the second access line oriented in the second direction and the fourth access line oriented in the second direction.
4. The device of claim 1 , wherein the first plate line is coupled with each of the second plate lines through respective on pitch vias (OPVs).
5. The device of claim 1 , further comprising:
a third plate line oriented in the first direction and coupled with other ferroelectric memory cells of the first array; and
a plurality of fourth plate lines oriented in the first direction, each plate line of the plurality of fourth plate lines coupled with the third plate line and other ferroelectric memory cells of the second array.
6. The device of claim 5 , wherein:
the first plate line and the plurality of second plate lines are associated with cells having even-numbered addresses; and
the third plate line and the plurality of fourth plate lines are associated with cells having odd-numbered addresses.
7. The device of claim 5 , wherein the third plate line is coupled with each of the fourth plate lines through respective on pitch vias (OPVs).
8. The device of claim 1 , wherein the first array and the second array overlie the support circuitry.
9. An electronic memory device, comprising:
a first array of ferroelectric memory cells configured in a cross point architecture, each ferroelectric memory cell of the first array coupled with a first access line oriented in a first direction and a second access line oriented in a second direction that is substantially orthogonal to the first direction;
a first plate line oriented in the first direction and coupled with ferroelectric memory cells of the first array;
a second array of ferroelectric memory cells configured in the cross point architecture, wherein the first array overlies the second array, each ferroelectric memory cell of the second array coupled with a third access line oriented in the first direction and a fourth access line oriented in the second direction;
a plurality of second plate lines oriented in the first direction, each plate line of the plurality of second plate lines coupled with the first plate line and ferroelectric memory cells of the second array; and
support circuitry coupled with the first array and the second array,
wherein the first plate line is coupled with each of the second plate lines through respective on pitch vias (OPVs), and
wherein the OPVs are located at locations where digit line decoders are discontinuous.
10. An electronic memory device, comprising:
a first array of ferroelectric memory cells configured in a cross point architecture, each ferroelectric memory cell of the first array coupled with a first access line oriented in a first direction and a second access line oriented in a second direction that is substantially orthogonal to the first direction;
a first plate line oriented in the first direction and coupled with ferroelectric memory cells of the first array;
a second array of ferroelectric memory cells configured in the cross point architecture, wherein the first array overlies the second array, each ferroelectric memory cell of the second array coupled with a third access line oriented in the first direction and a fourth access line oriented in the second direction;
a plurality of second plate lines oriented in the first direction, each plate line of the plurality of second plate lines coupled with the first plate line and ferroelectric memory cells of the second array; and
support circuitry coupled with the first array and the second array,
wherein the first plate line is coupled with each of the second plate lines through respective on pitch vias (OPVs), and
wherein one or more of the OPVs comprises a selector device between the first plate line and a second plate line of the plurality of second plate lines.
11. The device of claim 10 , further comprising:
a plurality of additional access lines each coupled with a selector device of the one or more OPVs.