IP Library Granted Patent US 10,014,292
Granted Patent B2
US 10,014,292 · App. 15/477,106 · Granted Jul 3, 2018

3D semiconductor device and structure

Inventors: Zvi Or-Bach (San Jose, CA); Brian Cronquist (San Jose, CA)
Assignee: MONOLITHIC 3D INC.
H01L27/0688H01L21/6835H01L25/071H01L25/117H01L27/0694H01L27/088H01L27/092H01L2224/18
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Quick Facts
Patent No.
US 10,014,292
App. No.
15/477,106
Filed
Apr 2, 2017
Granted
Jul 3, 2018
Kind
B2
Examiner
HO, TU TU V
Art Unit
2818
USPC
257/686
Abstract

A 3D semiconductor device, the device including: a first die including a first transistors layer and a first interconnection layer; and a second die overlaying the first die, the second die including a second transistors layer and a second interconnection layer, where the second die thickness is less than 2 microns, and where the first die is substantially larger than the second die.

Claims (62)

1. A 3D semiconductor device, the device comprising:

a first die comprising a first transistors layer and a first interconnection layer; and

a second die overlaying said first die, said second die comprising a second transistors layer and a second interconnection layer,

wherein said second die thickness is less than 20 microns,

wherein said first die is substantially larger than said second die, and

wherein said second die comprises a cut layer, said cut layer provides for future die thinning.

2. The device according to claim 1 ,

wherein said second die is directly connected to said first die, and

said device further comprising:

a third die directly connected to said first die.

3. The device according to claim 1 , further comprising:

a thermal isolative layer disposed between said first die and said second die,

wherein said isolative layer has a thermal conductivity less than 0.5 W/m-K.

4. The device according claim 1 ,

wherein said second die is a memory die.

5. The device according claim 1 ,

wherein said overlaying comprises a face-to-face (F2F) die orientation.

6. The device according claim 1 ,

wherein said first die is embedded as part of a wafer having a diameter larger than 150 mm.

7. The device according claim 1 ,

wherein said second die is a pre-tested die.

8. A 3D semiconductor device, the device comprising:

a first strata comprising a first transistors layer and a first interconnection layer, and

a second strata overlaying said first strata, said second strata comprising a second transistors layer and a second interconnection layer,

wherein said first strata is a wafer having a diameter larger than 150 mm, and

wherein said second strata is an isolated die having a size smaller than 30 mm by 30 mm,

wherein said second strata has a thickness less than 20 microns, and

wherein said second strata comprises a cut layer, said cut layer provides for future die thinning.

9. The device according to claim 8 ,

wherein said die is directly connected to said first strata, and

said device further comprising:

a third die directly connected to said first strata.

10. The device according to claim 8 , further comprising:

a thermal isolative layer disposed between said first strata and said die,

wherein said isolative layer has a thermal conductivity less than 0.5 W/m-K.

11. The device according claim 8 ,

wherein said die is a memory die.

12. The device according claim 8 ,

wherein said overlaying comprises a face-to-face (F2F) die to wafer orientation.

13. The device according claim 8 ,

wherein said first strata is embedded as part of a wafer having a diameter larger than 150 mm.

14. The device according claim 8 ,

wherein said die is a pre-tested die.

15. A 3D semiconductor device, the device comprising:

a first strata comprising a first transistors layer and a first interconnection layer, and

a second strata overlaying said first strata, said second strata comprising a second transistors layer and a second interconnection layer,

wherein said second strata thickness is less than 20 microns,

wherein said second strata comprises a pre-tested die, and

wherein said second strata comprises a cut layer, said cut layer provides for future die thinning.

16. The device according to claim 15 ,

wherein said pre-tested die is a known good die by being tested before becoming part of said device.

17. The device according to claim 15 ,

wherein said die is directly connected to said first strata, and

said device further comprising:

a third die directly connected to said first strata.

18. The device according to claim 15 , further comprising:

a thermal isolative layer disposed between said first strata and said die,

wherein said isolative layer has a thermal conductivity less than 0.5 W/m-K.

19. The device according claim 15 ,

wherein said overlaying comprises a face-to-face (F2F) die to strata orientation.

20. The device according claim 15 ,

wherein said first strata is embedded as part of a wafer having a diameter larger than 150 mm.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 7, 2017
From: OR-BACH, ZVI; CRONQUIST, BRIAN
To: MONOLITHIC 3D INC.
Reel/Frame 044056/0008 →
Continuity (2)
Continuation In Part 14642724 · Mar 9, 2015
Related Publication 20170207214A1 · Jul 20, 2017
Cited By (10)
US 12,310,102 US 12,354,968 US 12,356,763 US 12,358,073 US 12,374,586 US 12,374,611 US 12,388,049 US 12,489,030 US 12,518,986 US 12,593,488