MEMS-based 3D ion trapping device for using laser penetrating ion trapping structure, and method for manufacturing same
An ion trap device is disclosed with a method of manufacturing thereof including a substrate, first and second RF electrode rails, first and second DC electrodes on either upper or lower side of substrate, and a laser penetration passage connected to ion trapping zone from outer side of the first or second side of substrate. The substrate includes ion trapping zone in space defined by first and second sides of substrate separated by a distance with reference to width direction of ion trap device. The first and second RF electrode rails are arranged in parallel longitudinally of ion trap device. The first RF electrode is arranged on upper side of first side, the second DC electrode is arranged on lower side of first side, the first DC electrode is arranged on upper side of second side, and the second RF electrode rail is arranged on lower side of second side.
1. An ion trap device, comprising:
a substrate;
a first RF electrode rail, a second RF electrode rail, at least one first DC electrode, and at least one second DC electrode on either an upper side or a lower side of the substrate, wherein
the substrate includes an ion trapping zone in a space defined by a first side and a second side of the substrate separated by a predetermined distance with reference to a width direction of the ion trap device,
the first RF electrode rail and the second RF electrode rail are arranged in parallel along a longitudinal direction of the ion trap device, and
the first RF electrode is arranged on an upper side of the first side, the at least one second DC electrode is arranged on a lower side of the first side, the at least one first DC electrode is arranged on an upper side of the second side, and the second RF electrode rail is arranged on a lower side of the second side; and
a laser penetration passage formed to pass a laser and be arranged in a direction, which set at a predetermined angle, between the width direction and the longitudinal direction, wherein the laser penetration passage is connected to
a first inner hole formed in the first side of the substrate,
the ion trapping zone, and
a second inner hole formed in the second side of the substrate, and
the laser penetration passage is configured to guide the laser to pass through the first inner hole and the second inner hole.
2. The ion trap device according to claim 1 , wherein
the at least one first DC electrode includes a plurality of first DC electrodes,
the at least one second DC electrode includes a plurality of second DC electrodes, and
the plurality of first DC electrodes and the plurality of second DC electrodes are respectively arranged in parallel along the longitudinal direction.
3. The ion trap device according to claim 1 , further comprising a plurality of processing holes on the upper side or the lower side of the substrate corresponding to a position of the laser penetration passage.
4. The ion trap device according to claim 1 , further comprising at least one side DC electrode on each of opposite sides of the space with respect to the first RF electrode rail and the second electrode rail.