Protective metal oxy-fluoride coatings

1. A method of coating a chamber component for a plasma processing chamber, comprising:

providing a metal oxide source material consisting of a metal oxide having an empirical formula of M x_source O y_source , wherein M x_source is a metal or a mixture of a plurality of metals selected from a group consisting of gadolinium, aluminum, cerium, dysprosium, zirconium, calcium, erbium, lanthanum, neodymium, ytterbium and strontium, and wherein y_source has a value of 0.1 to 2 times a value of x; and

performing sputter deposition of the metal oxide source material to form a metal oxy-fluoride coating on the chamber component, wherein the chamber component is selected from a group consisting of a substrate support assembly, an electrostatic chuck, a ring, a chamber wall, a base, a gas distribution plate, a showerhead, a liner, a liner kit, a shield, a plasma screen, a flow equalizer, a cooling base, a chamber viewport, a chamber lid, a face plate and a selectivity modulation device, and wherein the chamber component comprises a material selected from a group consisting of a Al 2 O 3 , Y 2 O 3 , yttrium aluminum garnet, Y 4 Al 2 O 9 , a solid-solution of Y 2 O 3 —ZrO 2 , SiC, AlN, TiO, TiN and AlF, and wherein the chamber component does not comprise SiO 2 and a polymer;

wherein performing the sputter deposition comprises introducing at least one of fluorine ions or fluorine radicals to the sputtered metal oxide source material during the sputter deposition;

wherein the metal oxy-fluoride coating formed on the chamber component has an empirical formula of M x_coating O y_coating F z_coating , wherein M x_coating is the metal or the mixture of the plurality of metals selected from the group consisting of gadolinium, aluminum, cerium, dysprosium, zirconium, calcium, erbium, lanthanum, neodymium, ytterbium and strontium;

wherein y_coating has a value of 0.1 to 1.9 times the value of x and z_coating has a value of 0.1 to 3.9 times the value of x;

wherein one of:

a) M x_coating has a valence of 2 and the metal oxy-fluoride coating comprises 37-48 at. % of the metal or the mixture of the plurality of metals, 10-43 at. % oxygen, and 10-53 at. % fluorine;

b) M x_coating has a valence of 3 and the metal oxy-fluoride coating comprises about 27-38 at. % of the metal, about 10-52 at. % oxygen, and about 10-63 at. % fluorine; or

c) M x_coating has a valence of 4 and the metal oxy-fluoride coating comprises about 22-32 at. % of the metal, about 10-58 at. % oxygen, and about 10-68 at. % fluorine; and

wherein the metal oxy-fluoride coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.

2. The method of claim 1 , further comprising heating the chamber component to 15 to 150 degrees Celsius.

3. The method of claim 1 , wherein the sputter deposition is performed in a chamber having a pressure of 0.1 to 100 mTorr.

4. The method of claim 1 , wherein the chamber component consists essentially of a material selected from a group consisting of Al 2 O 3 , Y 2 O 3 , yttrium aluminum garnet, Y 4 Al 2 O 9 , a solid-solution of Y 2 O 3 —ZrO 2 , SiC, AlN, TiO, TiN and AlF.

5. The method of claim 1 , wherein the chamber component consists of Al 2 O 3 , Y 2 O 3 , yttrium aluminum garnet, Y 4 Al 2 O 9 , a solid-solution of Y 2 O 3 —ZrO 2 , SiC, AlN, TiO, TiN or AlF.

6. The method of claim 1 , wherein M x_coating has the valence of 2 and the metal oxy-fluoride coating comprises approximately 40-45 at. % of the metal or the mixture of the plurality of metals, approximately 20-35 at. % oxygen, and approximately 20-40 at. % fluorine.

7. The method of claim 1 , wherein M x_coating has the valence of 4 and the metal oxy-fluoride coating comprises approximately 26-28 at. % of the metal or the mixture of the plurality of metals, approximately 30-42 at. % oxygen, and approximately 30-44 at. % fluorine.

8. The method of claim 1 , wherein y_coating has a value of 0.1 times the value of x.

9. The method of claim 1 , wherein y_coating has a value of 1.4 to 1.9 times the value of x.

10. The method of claim 1 , wherein M x_coating has the valence of 3 and the metal oxy-fluoride coating comprises approximately 32-34 at. % of the metal or the mixture of the plurality of metals, approximately 30-36 at. % oxygen, and approximately 30-38 at. % fluorine.

11. The method of claim 1 , wherein M x_coating comprises at least two metals selected from the group consisting of gadolinium, aluminum, cerium, dysprosium, zirconium, calcium, erbium, lanthanum, neodymium, ytterbium and strontium.

12. The method of claim 1 , wherein M x_coating has the valence of 3.

13. The method of claim 1 , wherein z_coating has a value of 0.1 to 0.2 times the value of x.

14. The method of claim 1 , wherein z_coating has a value of 2.8 to 3.9 times the value of x.

15. The method of claim 1 , wherein y_coating has a value of 0.1 times the value of x or 1.4 to 1.9 times a value of x and z_coating has a value of 0.1 to 0.2 times the value of x or 2.8 to 3.9 times the value of x.

16. The method of claim 1 , wherein M x_coating has the valence of 2.

17. The method of claim 1 , wherein M x_coating has the valence of 4.