Defect inspection device, display device, and defect classification device
A defect inspection device is provided with an illumination optical system that irradiates light or an electron beam onto a sample, a detector that detects a signal obtained from the sample through the irradiation of the light or electron beam, a defect detection unit that detects a defect candidate on the sample through the comparison of a signal output by the detector and a prescribed threshold, and a display unit that displays a setting screen for setting the threshold. The setting screen is a two-dimensional distribution map that represents the distribution of the defect candidates in a three dimensional feature space having three features as the axes thereof and includes the axes of the three features and the threshold, which is represented in one dimension.
1. A defect inspection device, comprising:
an illumination optical system that irradiates a sample with a light or an electron beam;
a detector that detects a signal obtained from the sample by irradiation with the light or the electron beam;
a defect detecting unit that detects defect candidates on the sample by comparing a signal output from the detector with a predetermined threshold; and
a display unit that displays a setting screen for setting the threshold,
wherein the setting screen is a two-dimensional distribution diagram that represents a distribution of defect candidates in a three-dimensional feature space with three features as axes and includes the axes of three features and the threshold represented in one dimension.
2. The defect inspection device according to claim 1 , wherein
the threshold is defined by a two-dimensional plane in the three-dimensional feature space, and
the two-dimensional distribution diagram is what the distribution of defect candidates in the feature space is projected onto a two-dimensional plane in a direction parallel to the two-dimensional plane of the threshold.
3. The defect inspection device according to claim 2 , wherein
the defect candidates displayed in the two-dimensional distribution diagram have been judged to be either a defect to be detected or a defect not to be detected by a user in advance, and
the threshold divides the feature space in two.
4. The defect inspection device according to claim 2 , wherein the display unit displays thereon a threshold change input unit for changing a position of the threshold on the two-dimensional distribution diagram together with the two-dimensional distribution diagram.
5. The defect inspection device according to claim 4 , wherein the display of the position of the threshold on the two-dimensional distribution diagram is updated in real time according to content input to the threshold change input unit.
6. The defect inspection device according to claim 4 , wherein the threshold change input unit includes a parallel translation input unit that translates the threshold on the two-dimensional distribution diagram.
7. The defect inspection device according to claim 2 , wherein the two-dimensional distribution diagram includes an interface that enables the threshold to be updated by moving a predetermined position of the threshold.
8. The defect inspection device according to claim 7 , wherein the interface includes at least either one of:
a first interface enabling an intercept of the threshold on any of the exes composing the three-dimensional feature space to be moved; and
a second interface enabling the threshold represented in one dimension to be translated.
9. The defect inspection device according to claim 4 , wherein when tilt of the threshold on the two-dimensional distribution diagram is changed, the display unit updates the two-dimensional distribution diagram with a new two-dimensional distribution diagram projected in a direction parallel to the two-dimensional plane of the changed threshold in the feature space.
10. The defect inspection device according to claim 4 , wherein
the display unit displays thereon a comparison table including the number of defects determined to be a defect to be detected or a defect not to be detected by the user in advance and the number of defects automatically judged to be a defect to be detected or a defect not to be detected by the threshold, and
the display unit updates the comparison table according to a change of the threshold.
11. The defect inspection device according to claim 1 , wherein the display unit further displays thereon a histogram showing the number of defect candidates in each interval according to a distance from the threshold in the two-dimensional distribution diagram.
12. The defect inspection device according to claim 11 , wherein the histogram is what an interval including data resulting in a distance of 0 from the threshold to a defect candidate is highlighted, or the interval is associated with the display of the threshold on the two-dimensional distribution diagram.
13. The defect inspection device according to claim 1 , wherein
the threshold is defined by a two-dimensional plane in the three-dimensional feature space, and
size or color of a mark representing each defect candidate on the two-dimensional distribution diagram is determined according to a distance from an intercept of the threshold on any of the axes composing the three-dimensional feature space to the defect candidate.
14. The defect inspection device according to claim 13 , wherein
the axes composing the three-dimensional feature space are associated with different colors, respectively, and
the color of a mark representing each defect candidate on the two-dimensional distribution diagram represents distances from the axes composing the three-dimensional feature space.
15. A display device for displaying information of defect candidates from a defect inspection device, the display device comprising a display unit that displays thereon a setting screen for setting a threshold for judgement of defect candidates,
wherein the setting screen is a two-dimensional distribution diagram that represents a distribution of defect candidates in a three-dimensional feature space with three features as axes and includes the axes of three features and the threshold represented in one dimension.
16. A defect inspection device, comprising:
an illumination optical system that irradiates a sample with a light or an electron beam;
a detector that detects a signal obtained from the sample by irradiation with the light or the electron beam;
a defect classifying unit that classifies a defect on the sample by comparing a signal output from the detector with at least one threshold; and
a display unit that displays a setting screen for setting the threshold,
wherein the setting screen is a two-dimensional distribution diagram that represents a distribution of defect candidates in a three-dimensional feature space with three features as axes and includes the axes of three features and the threshold represented in one dimension.