Device for prefixing of substrates
A method and a device for prefixing substrates, whereby at least one substrate surface of the substrates is amorphized in at least one surface area, characterized in that the substrates are aligned and then make contact and are prefixed on the amorphized surface areas.
1. A device for prefixing first and second substrates, the device comprising:
at least one pretreatment system for pretreating at least one substrate surface of the first and second substrates in at least one surface area;
an alignment system for aligning the first and second substrates; and
a prefixing system for making contact with and prefixing the aligned first and second substrates on the pretreated surface areas;
wherein the prefixing is done only at partial surfaces, and
wherein local application of force is used to reach equivalent pressure for spontaneous bonds in the partial surfaces and thereby to prefix the first and second substrates.
2. The device according to claim 1 , wherein the prefixing system is located downstream from the alignment system.
3. The device according to claim 1 , wherein said at least one pretreated substrate surface is amorphized.