IP Library Granted Patent US 10,340,161
Granted Patent B2
US 10,340,161 · App. 15/535,082 · Granted Jul 2, 2019

Device for prefixing of substrates

Inventor: Friedrich Paul Lindner (Scharding, AT)
Assignee: EV Group E. Thallner GmbH
H01L21/67092H01L21/02068H01L21/02592H01L21/2007H01L21/32055H01L21/68H01L2021/60067
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Quick Facts
Patent No.
US 10,340,161
App. No.
15/535,082
Granted
Jul 2, 2019
Kind
B2
Abstract

A method and a device for prefixing substrates, whereby at least one substrate surface of the substrates is amorphized in at least one surface area, characterized in that the substrates are aligned and then make contact and are prefixed on the amorphized surface areas.

Claims (8)

1. A device for prefixing first and second substrates, the device comprising:

at least one pretreatment system for pretreating at least one substrate surface of the first and second substrates in at least one surface area;

an alignment system for aligning the first and second substrates; and

a prefixing system for making contact with and prefixing the aligned first and second substrates on the pretreated surface areas;

wherein the prefixing is done only at partial surfaces, and

wherein local application of force is used to reach equivalent pressure for spontaneous bonds in the partial surfaces and thereby to prefix the first and second substrates.

2. The device according to claim 1 , wherein the prefixing system is located downstream from the alignment system.

3. The device according to claim 1 , wherein said at least one pretreated substrate surface is amorphized.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 12, 2017
From: LINDNER, FRIEDRICH PAUL
To: EV GROUP E. THALLNER GMBH
Reel/Frame 042671/0864 →
Continuity (1)
Related Publication 20170345690A1 · Nov 30, 2017
Cited By (1)
US 12,635,477