Substrate holder and method for bonding two substrates
A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.
1. A method for bonding an upper substrate to a lower substrate, the method comprising:
aligning the upper substrate to the lower substrate when a distance between the upper substrate and the lower substrate is (d 1 );
heating the lower substrate such that the heated lower substrate radiates heat and heats the upper substrate at the distance (d 1 ) to a first temperature;
bringing the upper substrate and the heated lower substrate toward each other from the distance (d 1 ) until a distance (d 3 ) is reached between the upper substrate and the heated lower substrate at which time a time period (t 1 ) begins during which, a second temperature of the upper substrate is achieved and remains constant;
during the time period (t 1 ) when the second temperature of the upper substrate remains constant, pushing a center of the upper substrate into contact with a center of the heated lower substrate while edges of the upper substrate remain at the distance (d 3 ) from edges of the heated lower substrate; and
ending the time period (t 1 ) by dropping the edges of the upper substrate onto the edges of the heated lower substrate after the center of the upper substrate is pushed into contact with the center of the heated lower substrate, thereby at least temporarily bonding the upper substrate to the lower substrate.
2. A method for bonding an upper substrate to a lower substrate, the method comprising:
heating the lower substrate;
bringing the upper and the heated lower substrates toward each other such that the heated lower substrate increases a temperature of the upper substrate as the upper substrate approaches the heated lower substrate, the upper and the heated lower substrates being brought toward each other until a distance (d 3 ) is obtained between the upper and the heated lower substrates at which time a time period (t 1 ) begins during which a constant temperature of the upper substrate is maintained; and
at least temporarily bonding the upper and the heated lower substrates to one another within the time period (t 1 ) such that the time period (t 1 ) begins when the distance (d 3 ) is obtained and ends when the at least temporarily bonding of the upper and the heated lower substrates is achieved,
wherein, during at least a portion of the time period (t 1 ), one portion of the upper substrate is caused to be in contact with the heated lower substrate while another portion of the upper substrate remains out of contact with the heated lower substrate.
3. The method according to claim 2 , wherein the distance (d 3 ) of the portion of the upper substrate that remains out of contact with the heated lower substrate is between 1 mm and 0 mm.
4. The method according to claim 2 , wherein the time period (t 1 ) is greater than 5 seconds.
5. The method according to claim 2 , further comprising, before the bringing of the upper and lower substrates toward each other:
determining one or more of the time period (t 1 ), the distance (d 3 ), and the constant temperature.
6. The method according to claim 2 , further comprising, before the bringing of the upper and lower substrates toward each other:
empirically determining one or more of the time period (t 1 ), the distance (d 3 ), and the constant temperature.
7. The method according to claim 5 , wherein the determining of the one or more of the time period (t 1 ), the distance (d 3 ), and the constant temperature is based on one or more of a temperature of the lower substrate, materials of a substrate holder, materials of heat-conducting bodies, materials of the upper and lower substrates, and an approach speed of the upper and lower substrates.