Method for manufacturing semiconductor device having buffer layer
A method for manufacturing a semiconductor device includes the steps of forming a layer of a second conductivity type on a top-surface side of a substrate of a first conductivity type, and forming a buffer layer by performing a plurality of ion implantation steps, each of the ion implantation steps implanting ions of an impurity of the first conductivity type into a bottom-surface side of the substrate with an ion implantation angle with respect to a bottom surface of the substrate fixed, the ion implantation angle of a subsequent one of the ion implantation steps being smaller than that of the previous ion implantation step, wherein in the buffer layer formation step, the plurality of ion implantation steps is performed at a fixed acceleration energy.
1. A method for manufacturing a semiconductor device comprising:
forming a layer of a second conductivity type on a top-surface side of a substrate of a first conductivity type;
forming a buffer layer by performing a plurality of ion implantations, each of the ion implantations implanting ions of an impurity of the first conductivity type into a bottom-surface side of the substrate with an ion implantation angle with respect to a bottom surface of the substrate fixed, the ion implantation angle of a subsequent one of the ion implantations being smaller than that of the previous ion implantation,
forming a collector layer of the second conductivity type on the bottom-surface side of the substrate; and
after forming the collector layer, performing annealing, wherein
in forming the buffer layer, the plurality of ion implantations are performed at a fixed acceleration energy, and with ion implantation angle with respect to a bottom surface of the substrate fixed, the substrate is rotated while at least one ion implantation is performed, and
the forming of the buffer layer is performed subsequent to performing the annealing.
2. The method according to claim 1 , wherein in forming the buffer layer, the substrate is constantly rotated.
3. The method according to claim 1 , wherein
in a first one of the ion implantations, ions are implanted perpendicular to the bottom surface of the substrate, and
in second and subsequent ones of the ion implantations, the substrate is rotated.
4. The method according to claim 1 , wherein said rotation in forming the buffer layer is periodic.
5. The method according to claim 1 , wherein in forming the buffer layer, protons or helium ions are implanted.
6. The method according to claim 1 , further comprising:
performing annealing after the buffer layer formation,
wherein the annealing causes the buffer layer to have just one local maximum point of the impurity concentration along a depth thereof.
7. The method according to claim 1 , further comprising:
forming a collector electrode contacting the collector layer.
8. The method according to claim 7 , further comprising:
performing annealing after the buffer layer formation; and
forming an intermediate buffer layer before the annealing by implanting P into the bottom surface of the substrate,
wherein after the annealing, an impurity concentration peak of the intermediate buffer layer is located between a position of an impurity concentration peak of the buffer layer and a position of an impurity concentration peak of the collector layer, and
the impurity concentration peak of the intermediate buffer layer is higher than the impurity concentration peak of the buffer layer.
9. The method according to claim 8 , wherein the annealing causes the buffer layer to have just one local maximum point of the impurity concentration along a depth thereof.