Metal plating compositions
Reaction products of diamines with the reaction products of monoamines and bisanhydrides are included as additives in metal electroplating baths. The metal electroplating baths have good throwing power and deposit metal layers having substantially planar surfaces. The metal plating baths may be used to deposit metal on substrates with surface features such as through-holes and vias.
1. A composition comprising one or more sources of metal ions chosen from copper salts and tin salts, an electrolyte and a reaction product of one or more diamines with a reaction product of one or more monoamines and one or more compounds having formula:
where R is a linking group comprising:
where R 1 , R 2, R 3 and R 4 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 4 )alkyl, hydroxyl, hydroxy(C 1 -C 3 )alkyl, carboxyl, carboxy(C 1 -C 3 )alkyl or (C 1 -C 3 )alkoxy; R 5 and R 6 may be the same or different and comprise hydrogen, carboxyl and carboxy(C 1 -C 3 )alkyl; R 7, R 5 , R 9 and R 10 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl, carboxy(C 1 -C 3 )alkyl, linear or branched(C 1 -C 5 )alkoxy; R 11 and R 12 may be the same or different and comprise hydrogen or linear or branched (C 1 -C 5 )alkyl, Ar is an aryl group having 5 to 6 carbon atoms; n and m may be the same or different and are integers of 1 to 15; and q, r and t may be the same or different are integers of 1 to 10; and wherein the one or more monoamines comprises a formula:
wherein R 13 is hydrogen or linear or branched (C 1 -C 5 )alkyl, R′ is a nitrogen containing moiety comprising linear or branched nitrogen containing groups, aromatic or non-aromatic heterocyclic groups and r is 0 to 10 with a the proviso that when r is 0,R′ is joined to the nitrogen atom by a covalent bond; and
wherein the one or more diamines have the formula:
or
where R 42 and R 43 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 12 )alkyl, alkyleneoxy or substituted or unsubstituted (C 6 -C 18 )aryl, and R″ comprises:
or
a substituted or unsubstituted (C 6 -C 18 )aryl; where R 44 -R 51 may be the same or different and comprise hydrogen, linear or branched (C 1 -C 5 )alkyl, linear or branched hydroxy(C 1 -C 5 )alkyl or linear or branched (C 1 -C 5 )alkoxy; and Z is a carbon atom or nitrogen atom; and p and t may be the same or different and are independently integers of one or greater, e is an integer of 0 to 3, and a, b, c and d may be the same or different and are numbers from 1 or greater, and wherein R 52 and R 53 may be the same or different and are hydrogen or amino(C 1 -C 10 )alky.