Semiconductor device having silicon-germanium layer on fin and method for manufacturing the same
A semiconductor device is provided, including a substrate with an isolation layer formed thereon, wherein the substrate has a fin protruding up through the isolation layer to form a top surface and a pair of lateral sidewalls of the fin above the isolation layer; a silicon-germanium (SiGe) layer epitaxially grown on the top surface and the lateral sidewalls of the fin; and a gate stack formed on the isolation layer and across the fin, wherein the fin and the gate stack respectively extend along a first direction and a second direction. The SiGe layer formed on the top surface has a first thickness, the SiGe layer formed on said lateral sidewall has a second thickness, and a ratio of the first thickness to the second thickness is in a range of 1:10 to 1:30.
1. A method for manufacturing a semiconductor device, comprising:
providing a substrate with an isolation layer formed thereon, wherein the substrate has a fin protruding up through the isolation layer to form a top surface and a pair of lateral sidewalls of the fin above the isolation layer;
epitaxially growing a silicon-germanium (SiGe) layer on the top surface and the pair of lateral sidewalls of the fin, wherein the SiGe layer formed on the top surface has a first thickness, the SiGe layer formed on said lateral sidewall has a second thickness, and a ratio of the first thickness to the second thickness is in a range of 1:10 to 1:30; and
forming a gate stack on the isolation layer and across the top surface and the pair of lateral sidewalls of the fin, wherein the fin extends along a first direction, and the gate stack extends along a second direction different from the first direction.
2. The method according to claim 1 , wherein the first thickness of the SiGe layer is a maximum thickness of the SiGe layer formed on the top surface of the fin, and the second thickness of the SiGe layer is a maximum thickness of the SiGe layer formed on said lateral sidewall of the fin.
3. The method according to claim 1 , wherein the SiGe layer is grown by using a precursor comprising:
dichlorosilane (DCS, SiCl 2 H 2 ) or silane (SiH 4 ) in a flow rate larger than 100 standard cubic centimeters per minute (sccm).
4. The method according to claim 3 , wherein the precursor comprises dichlorosilane or silane in the flow rate larger than 100 sccm but no more than 300 sccm.
5. The method according to claim 3 , wherein the precursor further comprises germane (GeH 4 ) in a flow rate of 200 sccm to 900 sccm.
6. The method according to claim 5 , wherein the precursor further comprises hydrochloric acid (HCl) in a flow rate of 150 sccm to 300 sccm.
7. The method according to claim 1 , wherein the SiGe layer contains 20% to 75% of germanium (Ge).
8. The method according to claim 1 , wherein the second thickness of the SiGe layer formed on one of the pair of lateral sidewalls of the fin is in a range of 20Å to 50Å.
9. The method according to claim 1 , after formation of the gate stack, the method further comprises:
removing portions of the fin and the SiGe layer uncovered by the gate stack, so as to form a source region and a drain region positioned correspondingly to opposite sides of the fin, wherein the opposite sides of the fin are exposed by the gate stack; and
forming a SiGe source at the source region and forming a SiGe drain at the drain region,
wherein a channel region is formed between the source region and the drain region.
10. The method according to claim 9 , wherein the gate stack comprises:
a gate dielectric layer, formed on the isolation layer and contacting the SiGe layer formed on the top surface and formed on the pair of lateral sidewalls of the fin; and
a gate electrode layer formed on the gate dielectric layer.
11. The method according to claim 1 , further comprising:
removing the SiGe layer formed on the top surface of the fin before forming the gate stack, wherein parts of the SiGe layer on the pair of lateral sidewalls of the fin are remained after removal of the SiGe layer formed on the top surface of the fin.