IP Library Granted Patent US 10,923,447
Granted Patent B2
US 10,923,447 · App. 15/603,175 · Granted Feb 16, 2021

Semiconductor device assembly with die support structures

Inventors: Brandon P. Wirz (Boise, ID); David R. Hembree (Boise, ID)
Assignee: Micron Technology, Inc.
H01L24/14H01L24/03H01L24/04H01L24/05H01L24/06H01L24/11H01L24/13H01L24/16H01L24/17H01L25/0657H01L24/81H01L2224/0347H01L2224/03462H01L2224/0401H01L2224/05023H01L2224/05024H01L2224/05025H01L2224/05073H01L2224/05144H01L2224/05147H01L2224/05564H01L2224/05573H01L2224/05644H01L2224/05647H01L2224/05655H01L2224/0603H01L2224/1147H01L2224/11462H01L2224/13007H01L2224/13023H01L2224/13025H01L2224/13082H01L2224/13083H01L2224/13101H01L2224/13144H01L2224/13147H01L2224/13155H01L2224/1403H01L2224/1412H01L2224/14517H01L2224/16014H01L2224/16052H01L2224/16145H01L2224/16148H01L2224/1703H01L2224/17051H01L2224/17055H01L2224/17517H01L2224/81139H01L2224/81203H01L2224/81801H01L2224/81815H01L2225/06513H01L2225/06541H01L2225/06575H01L2924/3511
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Quick Facts
Patent No.
US 10,923,447
App. No.
15/603,175
Filed
May 23, 2017
Granted
Feb 16, 2021
Kind
B2
Art Unit
2819
USPC
257/737
Abstract

A semiconductor device assembly is provided. The assembly includes a first semiconductor die and a second semiconductor die disposed over the first semiconductor die. The assembly further includes a plurality of die support structures between the first and second semiconductor dies and a plurality of interconnects between the first and second semiconductor dies. Each of the plurality of die support structures includes a stand-off pillar and a stand-off pad having a first bond material with a first solder joint thickness between them. Each of the plurality of interconnects includes a conductive pillar and a conductive pad having a second bond material with a second solder joint thickness between them. The first solder joint thickness is less than the second solder joint thickness.

Claims (17)

1. A semiconductor device assembly, comprising:

a first semiconductor die;

a second semiconductor die disposed over the first semiconductor die;

a plurality of die support structures between the first and second semiconductor dies, wherein each of the plurality of die support structures includes a stand-off pillar and a stand-off pad having a first bond material with a first solder joint thickness between them; and

a plurality of interconnects between the first and second semiconductor dies, wherein each of the plurality of interconnects includes a conductive pillar and a conductive pad having a second bond material with a second solder joint thickness between them, and wherein the first solder joint thickness is less than the second solder joint thickness,

wherein the stand-off pad of each of the plurality of die support structures extends from a first planar surface of the first semiconductor die by a greater amount than the conductive pad of each of the plurality of interconnects extends from the first planar surface, and

wherein the stand-off pillar of each of the plurality of die support structures extends from a second planar surface of the second semiconductor die by a greater amount than the conductive pillar of each of the plurality of interconnects extends from the second planar surface.

2. The semiconductor device assembly of claim 1 , wherein the stand-off pillar of each of the plurality of die support structures has a first width and wherein the conductive pillar of each of the plurality of interconnects has a second width of less than the first width.

3. The semiconductor device assembly of claim 1 , wherein the stand-off pad of each of the plurality of die support structures has a first width and wherein the conductive pad of each of the plurality of interconnects has a second width of less than the first width.

4. The semiconductor device assembly of claim 1 , wherein the stand-off pad of each of the plurality of die support structures has a first width and wherein the stand-off pillar of each of the plurality of die support structures has a second width of less than the first width.

5. The semiconductor device assembly of claim 1 , wherein the first solder joint thickness is less than 1 μm.

6. The semiconductor device assembly of claim 1 , wherein the plurality of die support structures include die support structures disposed about a periphery of the semiconductor device assembly.

7. The semiconductor device assembly of claim 1 , wherein the plurality of die support structures include die support structures disposed in a medial region of the semiconductor device assembly.

8. The semiconductor device assembly of claim 1 , wherein each of the plurality of die support structures is electrically isolated from other circuit elements of the semiconductor device assembly.

9. The semiconductor device assembly of claim 1 , wherein each of the plurality of die support structures further includes a first barrier material separating the stand-off pillar from the first bond material and a second barrier material separating the stand-off pad from the first bond material.

10. The semiconductor device assembly of claim 1 , wherein each of the plurality of interconnects further includes a first barrier material separating the conductive pillar from the second bond material and a second barrier material separating the conductive pad from the second bond material.

11. The semiconductor device assembly of claim 1 , wherein the first die comprises a memory die, and wherein the second die comprises one of a memory die and a logic die.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050700/0535 →
RELEASE OF SECURITY INTEREST Recorded Jul 20, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046597/0393 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
SUPPLEMENT NO. 5 TO PATENT SECURITY AGREEMENT Recorded Aug 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION
Reel/Frame 043483/0686 →
SUPPLEMENT NO. 5 TO PATENT SECURITY AGREEMENT Recorded Aug 8, 2017
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 043482/0776 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 23, 2017
From: WIRZ, BRANDON P.; HEMBREE, DAVID R.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 042540/0050 →
Continuity (1)
Related Publication 20180342475A1 · Nov 29, 2018